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US 7,096,140 B2Granted
Test system, test method and test program for an integrated circuit by IDDQ testing
AssigneeKabushiki Kaisha Toshiba
InventorsYasuyuki Nozuyama, Mahito Shidou
Life of this patent
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Abstract
A test system for an integrated circuit includes a grouping module grouping measurement points on basis of values of the quiescent supply current and setting measurement point groups; an average value setting module setting a weighted average value minimizes the sum of dispersion of the quiescent supply current; a calculating module calculating a maximum estimated value of dispersion of the quiescent supply current on the basis of the weighted average value; and a judgment module judging whether the integrated circuit passes or fails the judgment specification.
Claims16
A test system comprising:
- a measuring unit configured to measure an integrated circuit;
- an input unit configured to receive measurement conditions of the integrated circuit;
- a grouping module configured to group measurement points on basis of values of quiescent supply current at the measurement points of a plurality of process margin samples, which are produced by using a plurality of process conditions, respectively, and to set measurement point groups;
- an average value setting module configured to set a weighted average value minimizing the sum of dispersion of the quiescent supply current due to differences in process condition between the measurement point groups;
- a calculating module configured to calculate a maximum estimated value of the dispersion of the quiescent supply current on the basis of the weighted average value;
- a storage unit configured to store a judgment specification for the measurement point groups by the measurement conditions and the values of the quiescent supply current;
- and
- a judging module configured to judge whether the integrated circuit passes or fails the judgment specification.
5 more elements
A computer implemented method for testing comprising:
- reading measurement point information of a quiescent supply current of an integrated circuit and storing the measurement point information in a measurement point area;
- reading values of the quiescent supply current of the integrated circuit and storing the values of the quiescent supply current in a sample measurement data area;
- grouping measurement points on the basis of the values of the quiescent supply current of a plurality of process margin samples, which are produced by using a plurality of process conditions, respectively, and setting measurement point groups;
- setting a weighted average of dispersion of the quiescent supply current so that the sum of variance indicating dispersion of the quiescent supply current is given a minimum, due to differences in process conditions between the measurement point groups;
- setting a judgment specification for the measurement point groups on the basis of the difference between the weighted average and the dispersion of the quiescent supply current;
- and
- judging whether the integrated circuit passes or fails the judgment specification.
4 more elements
A computer program product for executing a test system, comprising:
- instructions configured to read measurement point information of a quiescent supply current of an integrated circuit and to store the measurement point information in a measurement point area;
- instructions configured to read values of the quiescent supply current of the integrated circuit and to store the values of the quiescent supply current in a sample measurement data area;
- instructions configured to group measurement points on the basis of the values of the quiescent supply current of a plurality of process margin samples, which are produced by using a plurality of process conditions, respectively, and setting measurement point groups;
- instructions configured to set a weighted average of dispersion of the quiescent supply current so that the sum of variance indicating dispersion of the quiescent supply current is given a minimum, due to differences in process condition between the measurement point groups;
- instructions configured to set a judgment specification for the measurement point groups on the basis of the difference between the weighted average and the dispersion of the quiescent supply current;
- and
- instructions configured to judge whether the integrated circuit passes or fails the judgment specification.
4 more elements
Dependencies are inferred from the claim text.