Apparatus, method and program for generating a recipe for an inspection tool
AssigneeKabushiki Kaisha Toshiba
InventorYoshiyuki Sato
Life of this patent
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Abstract
An apparatus for generating a recipe for an inspection tool includes an extracting module extracting recipe parameters to be set to the inspection tool from among a group of recipe, a recipe candidate generator generating recipe candidates by combining settings of recipe parameters, a calculator calculating detecting parameters for each of the recipe candidates by inspecting a product using the inspection tool to which each of the recipe candidate is applied; and a recipe selecting module selecting a recipe candidate as a recipe for the inspection tool from among the recipe candidates.
Claims20
An apparatus for generating a recipe for an inspection tool, comprising:
- an extracting module configured to extract a plurality of recipe parameters to be set to the inspection tool from among a group of recipe parameters, based on inspection information;
- a recipe candidate generator configured to generate a plurality of recipe candidates by combining a plurality of settings of the recipe parameters;
- a calculator configured to calculate detecting parameters for each of the recipe candidates by inspecting a product using the inspection tool to which each of the recipe candidate is applied;
- and
- a recipe selecting module configured to select a recipe candidate as a recipe from among the recipe candidates so that the recipe has the detecting parameters that satisfy an inspection condition.
A computer implemented method for generating a recipe for an inspection tool, comprising:
- extracting a plurality of recipe parameters to be set to the inspection tool from among a group of recipe parameters, based on inspection information;
- generating a plurality of recipe candidates by combining a plurality of settings of the recipe parameters;
- calculating detecting parameters for each of the recipe candidates by inspecting a product using the inspection tool to which each of the recipe candidate is applied;
- and
- selecting a recipe candidate as a recipe from among the recipe candidates so that the recipe has the detecting parameters that satisfy an inspection condition.
A computer program product embodied in a computer readable recording medium for generating a recipe for an inspection tool, comprising:
- instructions configured to extract a plurality of recipe parameters to be set to the inspection tool from among a group of recipe parameters, based on inspection information;
- instructions configured to generate a plurality of recipe candidates by combining a plurality of settings of the recipe parameters;
- instructions configured to calculate detecting parameters for each of the recipe candidates by inspecting a product using the inspection tool to which each of the recipe candidate is applied;
- and
- instructions configured to select a recipe candidate as a recipe from among the recipe candidates so that the recipe has the detecting parameters that satisfy an inspection condition.
Dependencies are inferred from the claim text.