Back to results
US 7,095,937 B2Granted
Multi-level waveguide
AssigneeIntel Corporation
InventorVenkatesan Murali
Life of this patent
Estimating the term…
Abstract
A multi-level waveguide to transmit light through a series of substrates. The multi-level waveguide is made up of stacked substrates, each containing a two dimensional array of transparent material filled vias. Transparent materials such as optical fiber, cladding, and gas may be used to provide a pathway for light. Optionally, a conductive layer may be deposited on a substrate in the multi-level waveguide. The conductive layer can then interact with the multi-level waveguide through light detecting devices such as photodetectors.
Claims6
A method of making a multi-level waveguide comprising:
- depositing core material on a first substrate;
- patterning said core material with a mask;
- etching said patterned core material;
- and
- depositing a cladding layer on said core material;
- and
- etching a hole in said first substrate;
- etching a hole in a second substrate;
- aligning said first substrate hole to said second substrate hole;
- and
- attaching said first substrate to said second substrate.
8 more elements
Dependencies are inferred from the claim text.