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US 7,095,934 B2Granted
Optical waveguide manufacturing method
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorNaoki Tatehata
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Abstract
A method for manufacturing an optical waveguide of the present invention is one in which a mask is provided on the surface of a core layer followed by performing dry etching, and the dry etching step includes etching and ashing steps. With this, the irregularities formed on the periphery of a core pattern during manufacture of an optical waveguide can be eliminated, and an optical waveguide with a low optical transmission loss is proved.
Claims21
A method of manufacturing an optical waveguide having a core on a first clad layer, said method comprising:
- forming a core layer on the first clad layer, said core layer being a glass core layer made of glass material containing at least one element selected from a group consisting of alkaline elements, alkaline earth elements, and rare earth elements;
- forming a mask layer on a surface of the core layer so as to form a mask pattern over the core layer;
- core etching the core layer by dry etching using a mixed gas containing at least fluorocarbons and using the mask pattern so as to pattern the core layer to form the core, said core etching comprising repeatedly etching and ashing the core layer in an alternating manner;
- and
- removing the mask pattern after said core etching.
2 more elements
Dependencies are inferred from the claim text.