Optical device
AssigneeFujitsu Limited
InventorMasaki Sugiyama
Life of this patent
Estimating the term…
Abstract
An object of the present invention is to provide an optical device, in which a stress applying on ridge sections caused by the difference of thermal expansion between a metal film of which a ground electrode is formed and a substrate is reduced. In order to achieve this, in the optical device of the present invention, the ratio of the volume of a ground electrode portion formed at the position of other groove to the area of opening part of the other groove is smaller than the ratio of the volume to the area of a ground electrode portion formed at the position except the other groove.
Claims34
An optical device, comprising:
- a substrate having an electrooptic effect;
- a first ridge section formed by being sandwiched between two grooves formed on said substrate;
- a second ridge section, positioned adjacent to said first ridge section, formed by being sandwiched between one of said two grooves and other groove formed at the outside of said second ridge section;
- an optical waveguide formed inside said first ridge section;
- an optical waveguide formed inside said second ridge section;
- a signal electrode formed above said first ridge section;
- and
- a ground electrode, which is formed above said substrate in a state in which said ground electrode sandwiches said signal electrode by having a gap of a predetermined interval for said signal electrode for applying reference electric potential to said signal electrode,
- wherein the ratio of the volume of a ground electrode portion formed at the position of said other groove to the area of opening part of said other groove is smaller than the ratio of the volume to the area of a ground electrode portion formed at the position except said other groove.
An optical device, comprising:
- a substrate having an electrooptic effect;
- a first ridge section formed by being sandwiched between two grooves formed on said substrate;
- a second ridge section, positioned adjacent to said first ridge section, formed by being sandwiched between one of said two grooves and other groove formed at the outside of said second ridge section;
- an optical waveguide formed inside said first ridge section;
- an optical waveguide formed inside said second ridge section;
- a signal electrode formed above said first ridge section;
- and
- a ground electrode formed above said second ridge section,
- wherein the difference between the width of said signal electrode above said first ridge section and the width of said ground electrode above said second ridge section is equal to approximately 5 μm or less.
A optical device, comprising:
- a substrate having an electrooptic effect;
- a first ridge section formed by being sandwiched between a groove and another groove formed on said substrate;
- and
- a second ridge section formed by being sandwiched between said another grrove at a first side and a plurality of grooves formed at a second side of said second ridge section, a number of the grooves at said second side being greater than a number of the groove at said first side,
- wherein each of said first ridge section and said second ridge section includes an optical waveguide which is covered by a signal electrode or a ground electrode.
An optical device, comprising:
- a substrate having an electrooptic effect;
- a first ridge section formed by being sandwiched between a groove and another groove formed on said substrate;
- and
- a second ridge section formed by being sandwiched between said another groove at a first side and a plurality of grooves formed at a second side of said second ridge section, dimensions of the grooves at said second side being greater than dimensions of the groove at said first side,
- wherein each of said first ridge section and said second ridge section includes an optical waveguide which is covered by a signal electrode or a ground electrode.
Dependencies are inferred from the claim text.