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US 7,095,822 B1Granted
Near-field X-ray fluorescence microprobe
AssigneeXradia, Inc.
InventorWenbing Yun
Life of this patent
Estimating the term…
Abstract
This invention pertains to an x-ray microprobe that can be placed very close the sample surface. A practical implementation is an x-ray target material integrated to an atomic force microscope (AFM) tip and an electron beam is focused to the target materials to generate x-ray emission. This microprobe can be combined with energy-resolved detector or a fluorescence imaging system for material analysis applications.
Claims18
An x-ray probe system, comprising:
- a target supported adjacent a sample surface which is integrated into a probe tip of an atomic force microprobe (AFM);
- and
- a beam source for generating an energetic beam to generate x-ray emissions from the target to probe the sample.
Dependencies are inferred from the claim text.