Cathodes for fluorine gas discharge lasers
AssigneeCymer, Inc.
InventorsRichard G. Morton, Timothy S. Dyer
Life of this patent
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Abstract
A fluorine gas discharge laser electrode for a gas discharge laser having a laser gas containing fluorine and a method for manufacturing an electrode is disclosed. The electrode may include a copper and copper alloy body having an upper curved region containing a discharge footprint and a lower portion. In one aspect of an embodiment of the present invention, the upper region may include copper and the lower region may include a copper alloy. A portion of the electrode facing a gas discharge region may be formed in an arcuate shape extending into straight line portions on either side of the arcuate portion. The straight line portions may terminate in vertical straight sides.
Claims10
A gas discharge laser having a laser gas containing fluorine comprising:
- a gas discharge electrode comprising:
- a copper and copper alloy electrode body having an upper curved region containing the discharge footprint for the electrode comprising copper and a lower portion comprising a copper alloy;
- wherein the electrode has a facing portion facing a discharge region, the facing portion of the electrode being formed in an arcuate shape extending into straight line portions on either side of the arcuate portion, the straight line portions terminating in vertical straight sides, with the boundary between the copper and copper alloy including at least the arcuate portion.
A method of making an electrode for a gas discharge laser having a laser gas containing fluorine comprising:
- fabricating the electrode utilizing a copper and copper alloy cathode body having an upper curved region containing the discharge footprint for the electrode comprising copper and a lower portion comprising a copper alloy by diffusion bonding the upper curved region to the lower portion wherein the electrode has a facing portion facing a discharge region, the facing portion of the electrode being formed in an arcuate shape extending into straight line portions on either side of the arcuate portion, the straight line portions terminating in vertical straight sides, with the boundary between the copper and copper alloy including at least the arcuate portion;
- and
- forming the facing portion of the electrode in a arcuate shape extending into straight line portions on either side of the arcuate portion, the straight line portions terminating in vertical straight sides, with the boundary between the copper and the copper alloy including at least the arcuate portion.
A gas discharge laser having a laser gas containing fluorine comprising:
- a gas discharge electrode comprising:
- an electrode body having an upper curved region containing the discharge footprint for the electrode consisting essentially of copper and a lower portion comprising a copper alloy.
Dependencies are inferred from the claim text.