Injection locking type or MOPA type of laser device

An aligner for integrated circuit manufacturing with an injection locking type or MOPA type of laser device as a light source, the laser device comprising:

• an amplifier that amplifies seed laser light to emit amplified laser light;
• a laser monitor that receives the emitted amplified laser light and outputs a plurality of laser parameters of the emitted amplified laser light;
• an aligner that receives the amplified laser light and outputs a trigger signal;
• and
• a laser controller that receives the trigger signal from the aligner and receives the laser parameters from the laser monitor, the laser controller suspending exposure processing based on a command from the aligner during exposure, performing adjustment oscillation when the exposure is suspended so that the laser parameters are within a predetermined range when the exposure is resumed, and performing compensation for each of a delay time, jitter, and drift during adjustment oscillation, so that resumption of exposure is enabled, wherein when exposure is suspended the amplified laser light is prevented from emitting to the aligner.

An exposure method by an injection locking type or MOPA type of laser device, comprising the steps of:

• monitoring a plurality of laser parameters of emitted laser light;
• suspending exposure processing based on a command from an aligner during exposure;
• performing adjustment oscillation when the exposure is suspended, and performing compensation for each of a delay time, jitter, and drift during the adjustment oscillation, wherein when the exposure is suspended amplified laser light is prevented from emitting to the aligner;
• and
• enabling a resumption of exposure the laser parameters being within a predetermined range.

An aligner for integrated circuit manufacturing with an injection locking type or MOPA type of laser device as a light source, the laser device comprising:

• an amplifier that amplifies seed laser light to emit amplified laser light;
• an aligner that receives the amplified laser light and outputs a trigger signal;
• and
• a laser controller that receives the trigger signal from the aligner, the laser controller suspending exposure processing based on a command from the aligner during exposure, performing adjustment oscillation when the exposure is suspended so that the laser parameters are within a predetermined range when the exposure is resumed, and performing compensation for each of a delay time, jitter, and drift during adjustment oscillation, so that resumption of exposure is enabled, wherein when exposure is suspended the amplified laser light is prevented from emitting to the aligner.