Implant damaged oxide insulating region in vertical cavity surface emitting laser
AssigneeFinisar Corporation
InventorsJames R. Biard, James K. Guenter
Life of this patent
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Abstract
Optical transmitters are disclosed, one example of which includes a vertical cavity surface emitting laser that includes a substrate upon which a lower mirror is disposed. In this example, a spacer is disposed between the lower mirror and an active region. Another spacer separates the active region and an upper mirror. The upper mirror includes an oxide insulating region that is damaged by ion implantation so that desirable effects are achieved with respect to lateral sheet resistance, and quantum well recombination centers in the active region.
Claims29
A vertical cavity surface emitting laser, comprising:
- a substrate;
- a bottom mirror above the substrate;
- an active region above the bottom mirror;
- a top mirror located above the active region and including an oxide insulating region;
- and
- a gain guide ion implant region extending at least into the oxide insulating region such that a portion of the oxide insulating region includes damage from implanted ions, and the gain guide ion implant region extending below the oxide insulating region and at least into an unoxidized portion of the top mirror.
A method for producing a vertical cavity surface emitting laser, comprising:
- forming a bottom mirror on a substrate;
- forming an active region above the bottom mirror;
- forming a top mirror above the active region;
- oxidizing at least a portion of the top mirror to form an oxide insulating region;
- and
- defining a gain guide ion implant region that extends at least into the oxide insulating region of the top mirror and the gain guide ion implant region extending below the oxide insulating region and at least into an unoxidized portion of the top mirror, the gain guide ion implant region being defined by an ion implantation process that causes damage in areas to which the gain guide ion implant region extends.
Dependencies are inferred from the claim text.