Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays

A 2-dimensional rotational articulated hinge for connection to a support structure and a device to be rotated, the hinge comprising:

• a first 1-dimensional rotational articulated hinge having a first mounting point at a first end for connection to the support structure and having a second end;
• a second 1-dimensional rotational articulated hinge having a second mounting point at a first end for connection to the support structure and having a second end, the second end of the first 1-dimensional rotational articulated hinge being connected to the second end of the second 1-dimensional rotational articulated hinge;
• a third 1-dimensional rotational articulated hinge having a first end connected to the second ends of the first and second articulated 1-dimensional rotational hinges and having a second end for connection to the device to be rotated;
• whereby the first 1-dimensional rotational articulated hinge and the second 1-dimensional rotational articulated hinge define a first axis of rotation between the first and second mounting points, and the third 1-dimensional rotational articulated hinge defines a second torsional axis of rotation perpendicular to the first axis of rotation between the first end and second end of the third 1-dimensional rotational articulated hinge.