MOSFET drive circuit, programmable power supply and semiconductor test apparatus

A programmable power supply which can measure a current flowing through a load as a power supply target and switch a range according to a value of the current, comprising:

• a flow dividing circuit which comprises in accordance with the range one or more flow dividing branch circuits each of which includes a resistor and a MOSFET, the respective flow dividing branch circuits being connected with each other in parallel;
• and
• a MOSFET drive circuit which individually drives the MOSFETs included in the flow dividing circuit,
• wherein the MOSFET drive circuit comprises the MOSFET drive circuit which is comprised of:
• a capacitor which stores electric charges for charging a gate of the MOSFET;
• a first analog switch which changes over whether the gate of the MOSFET is charged with the electric charges stored in the capacitor;
• and
• a second analog switch which changes over whether the gate of the MOSFET is discharged by short-circuiting the gate and a source of the MOSFET.

A semiconductor test apparatus comprising:

• a programmable power supply which supplies a power to a device under test and measures a current flowing through the device under test, wherein the programmable power supply comprises:
• a flow dividing circuit which comprises in accordance with the range one or more flow dividing branch circuits each of which includes a resistor and a MOSFET, the respective flow dividing branch circuits being connected with each other in parallel;
• and
• a MOSFET drive circuit which individually drives the MOSFETs included in the flow dividing circuit,
• wherein the MOSFET drive circuit comprises the MOSFET drive circuit which is comprised of:
• a capacitor which stores electric charges for charging a gate of the MOSFET;
• a first analog switch which changes over whether the gate of the MOSFET is charged with the electric charges stored in the capacitor;
• and
• a second analog switch which changes over whether the gate of the MOSFET is discharged by short-circuiting the gate and a source of the MOSFET.