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US 7,095,168 B2Granted
Electron source forming substrate, and electron source and image display apparatus using the same
AssigneeCanon Kabushiki Kaisha
InventorsTadayasu Meguro, Kazuya Ishiwata, Shuji Yamada, Fumikazu Kobayashi
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Abstract
An electron source forming substrate comprises an insulating material film provided on a substrate surface, where an electron-emitting device is arranged. The insulating material film contains a metallic oxide and has a vacancy, so that the vacancy suppresses diffusion of Na from a substrate thereunder, thereby electron-emitting characteristic is maintained stable without adverse effect due to Na even after long time operation.
Claims17
An electron source comprising:
- a substrate;
- a first insulating material film provided directly on the substrate, wherein the first insulating material film includes a plurality of metallic oxide particles, has a plurality of vacancies formed between the metallic oxide particles, and has a ratio of said vacancy in its cross section within a range of 5–10%;
- a second insulating material film provided directly on the first insulating material film;
- a pair of electrodes provided on the second insulating material film;
- a pair of electroconductive films provided between the pair of electrodes and connected respectively to the pair of electrodes;
- and
- a carbon film provided on at least one electroconductive film of the pair of electroconductive films.
4 more elements
Dependencies are inferred from the claim text.