TEM sample equipped with an identifying function, focused ion beam device for processing TEM sample, and transmission electron microscope

A focused ion beam device for TEM sample working, comprising:

• means for working marks encoded with information specifying a TEM sample onto the surface of the TEM sample;
• and
• means for filing information relating to the worked TEM sample in a storage medium installable in a transmission electron microscope taking the sample specifying information as an index.

A transmission electron microscope comprising:

• means for reading a mark on a TEM sample from a secondary electron image of the mark encoded with sample-specifying information to recognize the specific information;
• and
• means for taking out information relating to the TEM sample from a storage medium using the sample-specifying information as an index and displaying the taken-out information on a display.

In combination:

• a set of one or more thin-processed TEM samples each written with a mark at a specific location on a peripheral part thereof, the mark being encoded with information specifying the sample and information relating to thin-processing of the TEM sample;
• and a storage medium having the information for each TEM sample filed therein using the sample-specifying information as an index.