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US 7,095,023 B2Granted
Charged particle beam apparatus, charged particle detection method, and method of manufacturing semiconductor device
AssigneeKabushiki Kaisha Toshiba
InventorsOsamu Nagano, Atsushi Ando
Life of this patent
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Abstract
A charged particle beam apparatus includes: a charged particle beam source which generates a charged particle beam to irradiate the charged particle beam onto a specimen; a demagnification optical system which demagnifies the charged particle beam; a deflector which deflects the charged particle beam to scan the specimen; and a first charged particle detector having a detection surface to detect a charged particle generated from the specimen which has been irradiated with the charged particle beam; wherein the detection surface of the first charged particle detector is disposed so as to face towards the charged particle beam source.
Claims19
A charged particle beam apparatus comprising:
- a charged particle beam source which generates a charged particle beam to irradiate the charged particle beam onto a specimen;
- a demagnification optical system which demagnifies the charged particle beam;
- a deflector which deflects the charged particle beam to scan the specimen;
- and
- a first charged particle detector having a detection surface to detect a charged particle generated from the specimen which has been irradiated with the charged particle beam;
- wherein the detection surface of said first charged particle detector has a rotationally symmetrical form about the center of the optical axis of the charged particle beam and is disposed so as to face the optical axis of the charged particle beam.
3 more elements
A charged particle beam apparatus comprising:
- a charged particle beam source which generates a charged particle beam to irradiate the charged particle beam onto a specimen;
- a demagnification optical system which demagnifies the charged particle beam:
- a deflector which deflects the charged particle beam to scan the specimen;
- a first charged particle detector having a detection surface to detect a charged particle generated from the specimen which has been irradiated with the charged particle beam, the detection surface of said first charged particle detector being disposed so as to face towards the charged particle beam source;
- a movable stage which supports the specimen;
- a charged particle beam adjustment specimen arranged on said stage;
- and
- a pattern for adjustment of the charged particle beam formed on said charged particle beam adjustment specimen;
- a second charged particle detector arranged between said demagnification optical system and the specimen and having a detection surface to detect a charged particle generated from the specimen which has been irradiated with the charged particle beam, said second charged particle detector being formed integrally with the charged particle beam adjustment specimen and arranged on said stage.
6 more elements
A charged particle beam apparatus comprising:
- a charged particle beam source which generates a charged particle beam to irradiate the charged particle beam onto a specimen;
- a demagnification optical system which demagnifies the charged particle beam;
- a deflector which deflects the charged particle beam to scan the specimen;
- and
- a first charged particle detector having a detection surface to detect a charged particle generated from the specimen which has been irradiated with the charged particle beam, the detection surface of said first charged particle detector being disposed so as to face towards the charged particle beam source;
- wherein said demagnification optical system includes an electrostatic lens having electrodes disposed in a plurality of stages in the direction of said optical axis, and the inner diameter of the electrode positioned on the specimen side of said plurality of stages of electrodes is larger than the inner diameter of the electrode positioned on said charged particle beam source side.
3 more elements
A charged particle beam apparatus comprising:
- a charged particle beam source which generates a charged particle beam to irradiate the charged particle beam onto a specimen;
- a demagnification optical system which demagnifies the charged particle beam;
- a deflector which deflects the charged particle beam to scan the specimen;
- and
- a first charged particle detector having a detection surface to detect a charged particle generated from the specimen which has been irradiated with the charged particle beam, the detection surface of said first charged particle detector being disposed so as to face towards the charged particle beam source;
- wherein said demagnification optical system includes an electrostatic lens having electrodes disposed in a plurality of stages in the direction of said optical axis, and the inner wall of the electrode positioned on the specimen side of said plurality of stages of electrodes is formed so as to have a tapered shape as viewed from the specimen.
3 more elements
A charged particle beam apparatus comprising:
- a charged particle beam source which generates a charged particle beam to irradiate the charged particle beam onto a specimen;
- a demagnification optical system which demagnifies the charged particle beam;
- a deflector which deflects the charged particle beam to scan the specimen;
- and
- a first charged particle detector having a detection surface to detect a charged particle generated from the specimen which has been irradiated with the charged particle beam, the detection surface of said first charged particle detector being disposed so as to face towards the charged particle beam source;
- wherein said demagnification optical system includes an electrostatic lens having electrodes disposed in a plurality of stages in the direction of said optical axis, and a source supplying voltage is applied to the electrode positioned on the specimen side of said plurality of stages of electrodes to control the trajectory of the charged particle.
3 more elements
A method of detecting a charged particle which is used in a charged particle beam apparatus comprising:
- a charged particle beam source which generates a charged particle beam and irradiates the charged particle beam onto a specimen;
- a demagnification optical system which demagnifies the charged particle beam to form an image on the specimen;
- a deflector which deflects the charged particle beam to scan the surface of the specimen;
- and a charged particle detector having a detection surface which has a rotationally symmetrical form about the center of the optical axis of the charged particle beam and which detects a charged particle which is generated from the specimen which has been irradiated by the charged particle beam;
- said method comprising:
- disposing the detection surface of said charged particle detector in such a manner as to face said optical axis;
- and
- detecting said charged particles on said detection surface by controlling the trajectory of the charged particle by an electrical field.
5 more elements
A method of detecting a charged particle which is generated from a specimen which has been irradiated by a charged particle beam, said method being used in a charged particle beam apparatus comprising:
- a charged particle beam source which generates a charged particle beam and irradiates the charged particle beam onto a specimen;
- a first demagnification optical system which demagnifies the charged particle beam with a first electrical field;
- a second demagnification optical system which uses a magnetic field or a second electrical field to further demagnify the charged particle beam which has been demagnified by said first demagnification optical system and forms an image on the specimen;
- and a deflector which deflects the charged particle beam to scan the specimen;
- said charged particle beam apparatus being connectable to an external power source which applies a retarding potential to the specimen to cause a deceleration in the incident velocity of the charged particle beam toward the specimen;
- said method comprising:
- detecting the charged particle between said first demagnification optical system and said second demagnification optical system when said retarding potential is applied to the specimen, or detecting the charged particle between said second demagnification optical system and the specimen when said retarding potential is not applied to the specimen.
4 more elements
A method of manufacturing a semiconductor device comprising a method of detecting a charged particle which is used in a charged particle beam apparatus comprising:
- a charged particle beam source which generates a charged particle beam and irradiates the charged particle beam onto a specimen;
- a demagnification optical system which demagnifies the charged particle beam to form an image on the specimen;
- a deflector which deflects the charged particle beam to scan the surface of the specimen;
- and a charged particle detector having a detection surface which has a rotationally symmetrical form about the center of the optical axis of the charged particle beam and which detects a charged particle which is generated from the specimen which has been irradiated by the charged particle beam;
- said method of detecting a charged particle including:
- disposing the detection surface of said charged particle detector in such a manner as to face said optical axis;
- and
- detecting said charged particles on said detection surface by controlling the trajectory of the charged particle by an electrical field.
5 more elements
A method of manufacturing a semiconductor device comprising a method of detecting a charged particle which is generated from a specimen which has been irradiated by a charged particle beam, said method being used in a charged particle beam apparatus comprising:
- a charged particle beam source which generates a charged particle beam and irradiates the charged particle beam onto a specimen;
- a first demagnification optical system which demagnifies the charged particle beam with a first electrical field;
- a second demagnification optical system which uses a magnetic field or a second electrical field to further demagnify the charged particle beam which has been demagnified by said first demagnification optical system and forms an image on the specimen;
- and a deflector which deflects the charged particle beam to scan the specimen;
- said charged particle beam apparatus being connectable to an external power source which applies a retarding potential to the specimen to cause a deceleration in the incident velocity of the charged particle beam toward the specimen;
- said method of detecting a charged particle including:
- detecting the charged particle between said first demagnification optical system and said second demagnification optical system when said retarding potential is applied to the specimen, or detecting the charged particle between said second demagnification optical system and the specimen when said retarding potential is not applied to the specimen.
4 more elements
Dependencies are inferred from the claim text.