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US 7,095,011 B2Granted
Photoelectric encoder for precise measurements
AssigneeMitutoyo Corporation
InventorsKenji Kojima, Tomotaka Takahashi
Life of this patent
Estimating the term…
Abstract
A plurality of photodiodes are disposed along a measurement axis on an optical receipt chip of a photoelectric encoder. Formed on each light acceptance surface of these photodiodes is a second optical grating which has more than one light shield portion extending in a “y” direction. Each acceptance surface has a portion that is disposed obliquely relative to the extending direction of the light shield portion.
Claims5
A photoelectric encoder comprising:
- a light source;
- a scale including a first optical grating for receiving irradiation of light from said light source;
- a plurality of light-receiving elements each having a light acceptance surface for incidence of an optical signal as generated based on the light falling onto said first optical grating, said plurality of light-receiving elements detecting a plurality of phase-different optical signals;
- and
- a second optical grating including more than one light shield portion disposed above each light acceptance surface of said plurality of light-receiving elements, and
- an optical receipt chip including said plurality of light-receiving elements and said second optical grating, wherein said optical receipt chip further includes,
- a contact portion provided for each of said plurality of light-receiving elements and connected to said light shield portion beneath said light shield portion with electrical conductivity while being in contact with said light acceptance surface, and
- an electrical wiring line provided for each of said plurality of light-receiving elements and connected to said light shield portion,
- wherein said plurality of light-receiving elements are disposed movably relative to said scale along a measurement axis and disposed along said measurement axis so that each light acceptance surface is slanted with respect to an extending direction of said light shield portion.
6 more elements
Dependencies are inferred from the claim text.