Fluorine-containing polymerizable monomer and polymer prepared by using same
AssigneeCentral Glass Company, Limited
InventorsSatoru Miyazawa, Kazuhiko Maeda, Kenji Tokuhisa, Shoji Arai
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Abstract
The present invention relates to a polymerizable monomer represented by the general formula (1), wherein R1 is a hydrogen atom, a halogen atom, a hydrocarbon group or a fluorine-containing alkyl group; R2 is a straight-chain or branched alkyl group, a cyclic alkyl group, an aromatic group, or a substituent having at least two of these groups, the R2 being optionally partially fluorinated; R3 is a hydrogen atom, a hydrocarbon group that is optionally branched, a fluorine-containing alkyl group, or a cyclic group having an aromatic or alicyclic structure, the R3 optionally containing a bond of an oxygen atom or carbonyl group; and n is an integer of 1–2.
Claims103
A polymer prepared by polymerizing a polymerizable monomer represented by the formula (19),
- wherein
- R1 is a hydrogen atom, a halogen atom, a hydrocarbon group or a fluorine-containing alkyl group;
- R3 is a hydrogen atom, a hydrocarbon group that is optionally branched, a fluorine-containing alkyl group, or a cyclic group having an aromatic or alicyclic structure, said R3 optionally containing an oxygen atom or carbonyl group;
- and
- R5 is a methylene group or a direct bond.
A polymer prepared by polymerizing a polymerizable monomer represented by the formula (19),
- wherein
- R1 is a halogen atom;
- R3 is a hydrogen atom, a hydrocarbon group that is optionally branched, a fluorine-containing alkyl group, or a cyclic group having an aromatic or alicyclic structure, said R3 optionally containing an oxygen atom or carbonyl group;
- and
- R5 is a methylene group or a direct bond.
A polymer prepared by polymerizing a polymerizable monomer represented by the formula (19),
- wherein
- R1 is a hydrogen atom, a halogen atom, a hydrocarbon group or a fluorine-containing alkyl group;
- R3 is a hydrocarbon group that is optionally branched, a fluorine-containing alkyl group, or a cyclic group having an aromatic or alicyclic structure, said R3 optionally containing an oxygen atom or carbonyl group;
- and
- R5 is a methylene group or a direct bond.
A reflection preventive material or optical device material comprising a polymer prepared by polymerizing a polymerizable monomer represented by the formula (19),
- wherein
- R1 is a hydrogen atom, a halogen atom, a hydrocarbon group or a fluorine-containing alkyl group;
- R3 is a hydrogen atom, a hydrocarbon group that is optionally branched, a fluorine-containing alkyl group, or a cyclic group having an aromatic or alicyclic structure, said R3 optionally containing an oxygen atom or carbonyl group;
- and
- R5 is a methylene group or a direct bond.
A reflection preventive material, optical device material or resist material comprising a polymer prepared by polymerizing a polymerizable monomer represented by the formula (19),
- wherein
- R1 is a halogen atom;
- R3 is a hydrogen atom, a hydrocarbon group that is optionally branched, a fluorine-containing alkyl group, or a cyclic group having an aromatic or alicyclic structure, said R3 optionally containing an oxygen atom or carbonyl group;
- and
- R5 is a methylene group or a direct bond.
A reflection preventive material, optical device material or resist material comprising a polymer prepared by polymerizing a polymerizable monomer represented by the formula (19),
- wherein
- R1 is a hydrogen atom, a halogen atom, a hydrocarbon group or a fluorine-containing alkyl group;
- R3 is a hydrocarbon group that is optionally branched, a fluorine-containing alkyl group, or a cyclic group having an aromatic or alicyclic structure, said R3 optionally containing an oxygen atom or carbonyl group;
- and
- R5 is a methylene group or a direct bond.
A polymer prepared by polymerizing a polymerizable monomer represented by the formula (5),
- wherein
- R1 is a hydrogen atom, a halogen atom, a hydrocarbon group or a fluorine-containing alkyl group;
- R3 is a hydrogen atom, a hydrocarbon group that is optionally branched, a fluorine-containing alkyl group, or a cyclic group having an aromatic or alicyclic structure, said R3 optionally containing an oxygen atom or carbonyl group;
- R5 is a straight-chain or branched, divalent, saturated hydrocarbon group having carbon atom number of 1–5;
- and
- n is an integer of 1–2.
A polymer prepared by polymerizing a polymerizable monomer represented by the formula (5),
- wherein
- R1 is a halogen atom;
- R3 is a hydrogen atom, a hydrocarbon group that is optionally branched, a fluorine-containing alkyl group, or a cyclic group having an aromatic or alicyclic structure, said R3 optionally containing an oxygen atom or carbonyl group;
- R5 is a straight-chain or branched, divalent, saturated hydrocarbon group having carbon atom number of 1–5;
- and
- n is an integer of 1–2.
A polymer prepared by polymerizing a polymerizable monomer represented by the formula (5),
- wherein
- R1 is a hydrogen atom, a halogen atom, a hydrocarbon group or a fluorine-containing alkyl group;
- R3 is a hydrocarbon group that is optionally branched, a fluorine-containing alkyl group, or a cyclic group having an aromatic or alicyclic structure, said R3 optionally containing an oxygen atom or carbonyl group;
- R5 is a straight-chain or branched, divalent, saturated hydrocarbon group having carbon atom number of 1–5;
- and
- n is an integer of 1–2.
A reflection preventive material, optical device material or resist material comprising a polymer prepared by polymerizing a polymerizable monomer represented by the formula (5),
- wherein
- R1 is a hydrogen atom, a halogen atom, a hydrocarbon group or a fluorine-containing alkyl group;
- R3 is a hydrogen atom, a hydrocarbon group that is optionally branched, a fluorine-containing alkyl group, or a cyclic group having an aromatic or alicyclic structure, said R3 optionally containing an oxygen atom or carbonyl group;
- R5 is a straight-chain or branched, divalent, saturated hydrocarbon group having carbon atom number of 1–5;
- and
- n is an integer of 1–2.
A reflection preventive material, resist material or optical device material comprising a polymer prepared by polymerizing a polymerizable monomer represented by the formula (5),
- wherein
- R1 is a halogen atom;
- R3 is a hydrogen atom, a hydrocarbon group that is optionally branched, a fluorine-containing alkyl group, or a cyclic group having an aromatic or alicyclic structure, said R3 optionally containing an oxygen atom or carbonyl group;
- R5 is a straight-chain or branched, divalent, saturated hydrocarbon group having carbon atom number of 1–5;
- and
- n is an integer of 1–2.
A reflection preventive material, resist material or optical device material comprising a polymer prepared by polymerizing a polymerizable monomer represented by the formula (5),
- wherein
- R1 is a hydrogen atom, a halogen atom, a hydrocarbon group or a fluorine-containing alkyl group;
- R3 is a hydrocarbon group that is optionally branched, a fluorine-containing alkyl group, or a cyclic group having an aromatic or alicyclic structure, said R3 optionally containing an oxygen atom or carbonyl group;
- R5 is a straight-chain or branched, divalent, saturated hydrocarbon group having carbon atom number of 1–5;
- and
- n is an integer of 1–2.
A resist material comprising a polymer prepared by polymerizing a polymerizable monomer represented by the formula (19),
- wherein
- R1 is a hydrogen atom, a halogen atom, a hydrocarbon group or a fluorine-containing alkyl group;
- R3 is a hydrogen atom, a hydrocarbon group that is optionally branched, a fluorine-containing alkyl group, or a cyclic group having an aromatic or alicyclic structure, said R3 optionally containing an oxygen atom or carbonyl group;
- and
- R5 is a methylene group or a bond.
Dependencies are inferred from the claim text.