ESD dissipative ceramics
AssigneeSaint-Gobain Ceramics & Plastics, Inc.
InventorsOh-Hun Kwon, Matthew A. Simpson, Roger J. Lin
Life of this patent
Estimating the term…
Abstract
This invention relates to a dense ceramics having ESD dissipative characteristics, tunable volume and surface resistivities in semi-insulative range (103-1011 Ohm-cm), substantially pore free, high flexural strength, light colors, for desired ESD dissipation characteristics, structural reliability, high vision recognition, low wear and particulate contamination to be used as ESD dissipating tools, fixtures, load bearing elements, work surfaces, containers in manufacturing and assembling electrostatically sensitive microelectronic, electromagnetic, electro-optic components, devices and systems.
Claims14
A method of forming ESD dissipative ceramics comprising the steps of:
- (a) forming a mixture comprising from about 85 to 60 vol. % Y-TZP and from about 15 to 40 vol. % ZnO;
- and
- (b) densifying the mixture to at least 95% of the theoretical density by a primary heat treatment.
A method of forming ESD dissipative ceramics comprising the steps of:
- (a) forming a mixture comprising from about 90 to 50 vol. % Y-TZP and from about 10 to 50 vol. % semi-conductive SnO2;
- and
- (b) densifying the mixture to at least 95% of the theoretical density by a primary heat treatment.
A method of forming an ESD dissipative ceramic component, comprising the steps of:
- sintering a composition comprising a base material comprising tetragonal zirconia and a resistivity modifier comprising 5 vol % to about 60 vol % of the base material, the resistivity modifier selected from the group consisting of ZnO, SnO2, LaMnO3, BaO·6Fe2O3and mixtures thereof, to form a sintered body;
- and
- hot isostatic pressing the sintered body to form an ESD dissipative ceramic component having a volume resistivity within a rang of 103 to 1011 Ohm-cm.
A method of forming an ESD dissipative ceramic component, comprising the steps of:
- heat treating a ceramic green body to densify the green body and form a densified component, the green body comprising a base material comprising tetragonal zirconia and a resistivity modifier;
- the resistivity modifier being selected from the group consisting of ZnO, SnO2, LaMnO3, BaO·6Fe2O3;
- and adjusting a resisistivity of the densified component by annealing the densified component.
Dependencies are inferred from the claim text.