Method of synthesizing hybrid metal oxide materials and applications thereof
AssigneeBraggone Oy
InventorAri Kärkkäinen
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Abstract
The present invention relates to metal oxide coating materials that can be used as thin film thin film coatings on various substrate surfaces. The invention also concerns a method of making metal oxide material which are stable in aqueous phase and that can be deposited on a substrate by liquid phase deposition, such as spin-on deposition. The new materials can be patterned lithographically or non-lithographically and are applicable for building up various electronic and opto-electronic device structures, such as anti-reflection layers, high-k interlayer and gate oxide structures for ICs, etch stop layer, CMP stop layer, solar cells, OLEDs packaging, optical thin film filters, optical diffractive grating applications and hybrid thin film diffractive grating structures.
Claims35
Method of forming a thin film on top of a substrate, comprising the steps of:
- applying on the surface of the substrate a composition obtained by reacting a metal oxide precursor with an organic compound, which contains at least one functional group capable of reacting with the metal element of the precursor, to produce an intermediate product, which is dissolved in liquid phase solution using a solvent and which can be polymerized;
- forming a thin layer on the surface;
- removing the solvent of the solution;
- and
- polymerizing the intermediate product into a cross-linked film;
- wherein the metal oxide precursor comprises a metal halogenide having the formula I
- MeXm, I
- wherein Me stands for a metal, X stands for a halogenide and m represents the valence of the metal;
- or
- a metal alkoxide, having the formula II
- MeOR1m II
- wherein R1 stands for a linear or branched, aliphatic or alicyclic alkyl group, which optionally is substituted by 1 to 3 substitutents selected from the group consisting of hydroxy, carboxy, oxo, nitro and amido groups, and Me and m have the same meaning as above.
Dependencies are inferred from the claim text.