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US 7,094,678 B2Granted
Electrostatic discharge protection of thin-film resonators
AssigneeAvago Technologies Wireless IP (Singapore) Pte. Ltd.
InventorPaul D. Bradley
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Abstract
A filter having a thin-film resonator fabricated on a semiconductor substrate and a method of making the same are disclosed. The filter has a bonding pad connected to the resonator and in contact with the substrate to form a Schottky diode with the substrate to protect the resonator from electrostatic discharges.
Claims8
A method of fabricating an apparatus, the method comprising:
- fabricating a bottom electrode layer on a substrate, the bottom electrode layer having an opening;
- fabricating a piezoelectric layer on the bottom electrode layer and on the substrate;
- fabricating a top electrode layer on the piezoelectric layer and on the substrate;
- wherein overlapping portions of the bottom electrode layer, the piezoelectric layer, and the top electrode layer forming a resonator;
- and
- fabricating a bonding pad on the bottom electrode layer, the bonding pad in contact with the substrate through the opening of the bottom electrode, the bonding pad and the substrate forming a diode.
3 more elements
Dependencies are inferred from the claim text.