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US 7,094,630 B2Granted
Method of fabricating semiconductor device having a chip, reinforcing plate, and sealing material sharing a common rear surface
AssigneeRenesas Technology Corp.
InventorsYoshihiro Tomita, Shinji Baba
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Abstract
A plurality of chips are mounted on a substrate, coupling portions between the chips and the substrate are sealed, the chips have rear surfaces thereof collectively polished, and the substrate with the chips thereon are separated into independent semiconductor devices.
Claims2
A method of manufacturing semiconductor device, comprising the steps of:
- providing a substrate having a semiconductor chip electrically connected thereon and a reinforcing plate arranged around the semiconductor chip, the semiconductor chip is electrically connected with the substrate through bump electrodes and having a gap between the substrate;
- sealing the gap with a sealing resin;
- and
- after the sealing step, grinding the sealing resin and one surface of the semiconductor chip together so as to form a common ground rear surface shared by the sealing resin and the semiconductor chip,
- wherein the reinforcing plate is proximate two sides of the semiconductor element, and the two sides are separate from ground surface.
2 more elements
Dependencies are inferred from the claim text.