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US 7,094,622 B1Granted
Polymer based tunneling sensor
AssigneeLouisiana Tech University Foundation, Inc.
InventorsTianhong Cui, Jing Wang, Yongjun Zhao
Life of this patent
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Abstract
A process for fabricating a polymer based circuit by the following steps. A mold of a design is formed through a lithography process. The design is transferred to a polymer substrate through a hot embossing process. A metal layer is then deposited over at least part of said design and at least one electrical lead is connected to said metal layer.
Claims10
A polymer based micro-machine formed by the steps comprising:
- a. forming a first and second mold, each having a design formed through a lithography process;
- b. transferring said design on each mold to a separate polymer substrate through a hot embossing process;
- c. depositing a metal layer over at least part of said designs;
- and
- d. connecting at least one electrical lead to said metal layer.
2 more elements
A polymer based micro-machine formed by the steps comprising:
- a. forming a mold of a comb drive structure through a lithography process;
- b. transferring said design to a polymer substrate through a hot embossing process;
- c. depositing a metal layer over at least part of said design;
- and
- d. connecting at least one electrical lead to said metal layer.
2 more elements
A polymer based micro-machine formed by the steps comprising:
- a. forming a mold of a design for a tunneling current sensor through a lithography process;
- b. transferring said design to a polymer substrate through a hot embossing process;
- c. depositing a metal layer over at least part of said design;
- and
- d. connecting at least one electrical lead to said metal layer.
2 more elements
Dependencies are inferred from the claim text.