Methods for marking a packaged semiconductor die including applying tape and subsequently marking the tape
AssigneeMicron Technology, Inc.
InventorsWilliam D. Tandy, Bret K. Street
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AssigneeMicron Technology, Inc.
InventorsWilliam D. Tandy, Bret K. Street
Estimating the term…
The present invention provides a method and apparatus for marking a semiconductor wafer or device. The method and apparatus have particular application to wafers or devices which have been subjected to a thinning process, including backgrinding in particular. The present method comprises reducing the cross-section of a wafer or device, applying a tape having optical energy-markable properties over a surface or edge of the wafer or device, and exposing the tape to an optical energy source to create an identifiable mark. A method for manufacturing an integrated circuit chip and for identifying a known good die are also disclosed. The apparatus of the present invention comprises a multilevel laser-markable tape for application to a bare semiconductor die. In the apparatus, an adhesive layer of the tape provides a homogenous surface for marking subsequent to exposure to electromagnetic radiation.
A method of marking a packaged semiconductor device comprising:
A method of marking a packaged semiconductor device having a semiconductor die comprising:
A method of marking a semiconductor die comprising:
A method of marking a packaged semiconductor device comprising:
A method of marking a packaged semiconductor device having a semiconductor die comprising:
A method of marking a semiconductor die comprising:
A method of marking a packaged semiconductor device comprising:
A method of marking a packaged semiconductor device having a semiconductor die comprising:
A method of marking a semiconductor die comprising:
A method of marking a packaged semiconductor device comprising:
A method of marking a packaged semiconductor device having a semiconductor die comprising:
A method of marking a semiconductor die comprising:
Dependencies are inferred from the claim text.