Process analyzer for monitoring electrochemical deposition solutions
AssigneeAdvanced Technology Materials, Inc.
InventorsMackenzie King, John Staples
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Abstract
The present invention relates to a process analyzer for analyzing composition of sample electrochemical deposition solutions, comprising at least one microelectrode having a radius of not more than about 5 μm. The process analyzer preferably comprises: (1) two or more independent analytical modules for analyzing fluid samples, (2) a primary manifold communicatively connected to the analytical modules for introducing fluid samples thereinto, and (3) a computational device communicatively associated with the analytical modules for colleting and processing analytical data therefrom, and therefore can be used to conduct automatic and simultaneous analysis of two or more sample solutions.
Claims20
A process analyzer for analyzing composition of sample electrochemical deposition solutions, said process analyzer comprising at least one microelectrode having a radius of not more than about 5 μm, wherein the microelectrode comprises a fiber selected from the group consisting of a carbon fiber and a platinum fiber, and further comprises a dielectric layer formed by oxidation of a metal or metal alloy including at least one metal selected from the group consisting of tantalum, niobium, zirconium, hafnium, and titanium.
A process analyzer for analyzing composition of sample electrochemical deposition solutions, said process analyzer comprising at least one microelectrode having a radius of not more than about 5 μm, wherein the microelectrode has a composite structure, including an inner electrically conductive metal core, and an outer dielectric layer formed by oxidization of a metal or metal alloy including at least one metal selected from the group consisting of tantalum, niobium, zirconium, hafnium, and titanium.
A process analyzer for analyzing composition of sample electrochemical deposition solutions, said process analyzer comprising:
- at least one microelectrode having a radius of not more than about 5 μm, having a composite structure including an inner electrically conductive metal core, and having an outer dielectric layer formed by oxidization of a metal or metal alloy including at least one metal selected from the group consisting of tantalum, niobium, zirconium, hafnium, and titanium;
- one or more analytical modules for analyzing fluid samples;
- a primary manifold communicatively connected to said one or more analytical modules for introducing fluid samples thereinto, the manifold comprising at least one of (i) one or more variable volume displacement pumps;
- (ii) one or more face-sealed valves;
- (iii) one or more two-way valves and/or three-way valves, and (iv) a make/break plate having pre-manufactured fluid pathways thereon;
- and
- a computational device communicatively associated with said one or more analytical modules for collecting and processing analytical data therefrom.
Dependencies are inferred from the claim text.