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AssigneeSemitool, Inc.
InventorsTimothy J. Reardon, Craig P. Meuchel, Thomas H. Oberlitner, Aleksander Owczarz, Raymon F. Thompson
Estimating the term…
A semiconductor processor for spray coating wafers or other semiconductor articles. The processor has a compartment in which are mounted a wafer transfer, coating station and thermal treatment station. The coating station has a spray processing vessel in which a movable spray-head and rotatable wafer holder. The spray station has coating viscosity control features. An ultrasonic resonating spray-head is precisely supplied with coating from a metering pump. The heat treatment station heat cures the coating and then cools the wafer. The system allows coatings to be applied in relatively uniform conformational layers upon irregular surfaces.
A wafer processor for processing a wafer such as a semiconductor wafer, a magnetic disk, or an optical disk, comprising:
A wafer processor for processing a wafer such as a semiconductor wafer, a magnetic disk, or an optical disk, comprising:
A wafer processor for processing a wafer such as a semiconductor wafer, a magnetic disk, or an optical disk, comprising:
A wafer processor for processing a wafer such as a semiconductor wafer, a magnetic disk, or an optical disk, comprising:
An apparatus for handling a wafer, comprising:
Dependencies are inferred from the claim text.