Method of and apparatus for magnetic-abrasive machining of wafers
AssigneeMagnetic Abrasive Technologies, Inc.
InventorGennady Kremen
Life of this patent
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Abstract
A method of magnetic-abrasive machining of parts has the steps of supporting a part, generating a magnetic field by magnetic means located at one side of the part, placing a magnetic-abrasive powder on a surface located at another, opposite side of the part, so that the magnetic-abrasive powder is attracted by the magnetic means and pressed to the surface of the part, and providing a relative movement of the parts and the magnetic abrasive powder retained by the magnetic means relative to one another so as to machine the surface of the part which is therefore open for observation and supply of the magnetic abrasive powder; and an apparatus is proposed as well.
Claims18
A method of magnetic-abrasive machining of a flat part, comprising the steps of supporting the flat part so that it has an upper surface and a lower surface;
- generating a magnetic field by magnetic means located under the lower surface of the flat part;
- placing a magnetic-abrasive powder on the upper surface, so that the flat part is located between said magnetic means and said magnetic-abrasive powder and the magnetic-abrasive powder is attracted to the upper surface of the flat part by said magnetic means at a side of the lower surface of the flat part;
- and providing a movement of the flat part and the magnetic-abrasive powder means relative to one another so as to machine the upper surface of the flat part which carries only the magnetic-abrasive powder and is therefore not obstructed but is open for observation and supply of the magnetic-abrasive powder.
An apparatus for magnetic-abrasive machining of a flat part, comprising means for supporting the flat part so that it has an upper surface and a lower surface;
- means for generating a magnetic field by magnetic means located under the lower surface of the flat part;
- means for placing a magnetic-abrasive powder on the upper surface of the flat part, so that the flat part is located between said magnetic means and said magnetic-abrasive powder and the magnetic-abrasive powder is attracted to the upper surface of the flat part by said magnetic means at a side of the lower surface of the flat part;
- and means for providing a relative movement of the flat part of the magnetic-abrasive powder relative to one another so as to machine the upper surface of the flat part which carries only the magnetic-abrasive powder and is therefore not obstructed but open for observation and supply of the magnetic-abrasive powder.
Dependencies are inferred from the claim text.