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US 7,094,123 B2Granted
Method of manufacturing an electron emitting device with carbon nanotubes
AssigneeCanon Kabushiki Kaisha
InventorsKazunari Oyama, Takeo Tsukamoto
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Abstract
There is provided a method of manufacturing an electron emitting device by disposing a substrate with a catalytic metal film inside a reaction vessel; feeding hydrogen gas and hydrocarbon gas simultaneously into the reaction vessel at a temperature close to room temperature; raising the temperature inside the reaction vessel; and producing carbon fibers by keeping the temperature inside the reaction vessel substantially constant.
Claims3
A method of manufacturing an electron emitting device comprising a plurality of carbon fibers, the method comprising the steps of:
- disposing a substrate with a catalytic material inside a reaction vessel;
- feeding hydrogen gas and hydrocarbon gas into the reaction vessel at a temperature close to a room temperature;
- and
- generating a plurality of carbon fibers by way of raising the temperature inside the reaction vessel,
- wherein the hydrocarbon gas contains a mixture of ethylene and acetylene gas, and
- wherein the ethylene gas and acetylene gas are individually diluted with inert gas.
3 more elements
Dependencies are inferred from the claim text.