Method of detecting over-actuation of MEM device
AssigneeSilverbrook Research Pty Ltd
InventorKia Silverbrook
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Abstract
A method of detecting an over-actuation condition within a micro electro-mechanical device is provided. The device is of a type having a support structure and an actuating arm that is movable relative to the support structure as a result of thermal expansion of at least part of the actuating arm due to heat inducing current flow through that part. The method comprises passing a current pulse having a predetermined duration tp through the part of the actuating arm, detecting the rate of movement of the actuating arm to a predetermined position beyond an operating position of the actuating arm, and determining whether the detected rate is greater than a normal rate for desired actuation of the actuating arm so as to detect the over-actuation condition.
Claims7
A method of detecting an over-actuation condition within a micro electro-mechanical device of a type having a support structure and an actuating arm that is movable relative to the support structure as a result of thermal expansion of at least part of the actuating arm due to heat inducing current flow through at least said part, the method comprising the steps of:
- passing at least one current pulse having a predetermined duration tp through at least said part of the actuating arm;
- detecting the rate of movement of the actuating arm to a predetermined position beyond an operating position of the actuating arm;
- and
- determining whether the detected rate is greater than a normal rate for desired actuation of the actuating arm so as to detect the over-actuation condition.
Dependencies are inferred from the claim text.