Acceleration sensor
AssigneeFujitsu Media Devices Limited
InventorsHiroshi Tanaka, Masanori Yachi
Life of this patent
Estimating the term…
Abstract
A piezoelectric vibrator 2 that generates an electric charge according to a stress and a weight 1 provided on the piezoelectric vibrator 2 are included. The piezoelectric vibrator 2 has multiple pairs of sensing electrodes 3a and 3b, and 4a and 4b, and the sensing electrodes 3a and 3b, and 4a and 4b are respectively connected in parallel so that capacitances Cd1 and Cd2 made of the sensing electrodes may be connected in parallel. It is thus possible to double the charge sensitivity with keeping the voltage sensitivity.
Claims15
An acceleration sensor comprising:
- a vibrator that generates an electric charge according to a stress;
- and
- a weight provided on the vibrator,
- wherein the vibrator has multiple pairs of sensing electrodes on front and back surfaces;
- capacitances formed with the sensing electrodes are connected in parallel;
- and
- the sensing electrodes located diagionally among the multiple pairs of sensing electrodes are connected through the vibrator, and the capacitances are connected in parallel.
An acceleration sensor package comprising an acceleration sensor including a vibrator that generates an electric charge according to a stress and a weight provided on the vibrator,
- wherein:
- the vibrator has multiple pairs of sensing electrodes on front and back surfaces;
- capacitances formed with the sensing electrodes are connected in parallel;
- and
- the sensing electrodes located diagonally among the multiple pairs of sensing electrodes are connected through the vibrator, and the capacitances are connected in parallel.
Dependencies are inferred from the claim text.