Imaging device comprising optically coupled fiber optic plate assembly
AssigneeRopintassco Holdings, L.P.
InventorDaniel Moonen
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Abstract
A fiber optic plate assembly is provided for transferring optical signals to a detector or other optical element within an imaging device or imaging system. The fiber optic plate assembly comprises first and second fiber optic plates coupled via an optical coupling gel configured to permit separation of the two plates from each other to permit repair or replacement of one of the plates. Alternatively, the imaging device may comprise a single fiber optic plate coupled directly to an optical detector.
Claims31
An electron beam imaging system comprising an electron beam source configured to direct a specimen analysis beam of electrons in the direction of a specimen under examination, and an imaging device configured to generate an image representing said specimen, wherein:
- said imaging device comprises first and second fiber optic plates and an optical detector;
- said electron beam imaging system comprises an evacuation chamber accommodating said specimen, said beam of electrons, and said imaging device;
- said optical detector defines an input face;
- said first fiber optic plate defines an input face and an output face;
- said output face of said first fiber optic plate is optically coupled and bonded to said input face of said optical detector;
- said second fiber optic plate defines an input face and an output face;
- said input face of said second fiber optic plate is coated with an optical scintillator configured to emit optical photons in response to incident electrons;
- said output face of said second fiber optic plate is optically coupled to said input face of said first fiber optic plate via an optical coupling gel;
- said optical coupling gel is configured to flow under a given shear rate;
- and
- said bond between said first fiber optic plate and said detector is configured to withstand a shear rate greater than said given shear rate at which said gel is configured to flow, enabling disengagement of said second fiber optic plate from said first fiber optic plate without substantial disturbance to the integrity of the bond between said first fiber optic plate and said detector.
A directed beam imaging system comprising a beam source configured to direct a specimen analysis beam in the direction of a specimen under examination, and an imaging device configured to generate an image representing said specimen, wherein:
- said imaging device comprises first and second fiber optic plates and an optical detector;
- said optical detector defines an input face;
- said first fiber optic plate defines an input face and an output face;
- said output face of said first fiber optic plate is optically coupled and bonded to said input face of said optical detector;
- said second fiber optic plate defines an input face and an output face;
- said input face of said second fiber optic plate is coated with an optical medium;
- said output face of said second fiber optic plate is optically coupled to said input face of said first fiber optic plate via an optical coupling gel;
- said optical coupling gel is configured to flow under a given shear rate;
- and
- said bond between said first fiber optic plate and said detector is configured to withstand a shear rate greater than said given shear rate at which said gel is configured to flow, enabling disengagement of said second fiber optic plate from said first fiber optic plate without substantial disturbance to the integrity of the bond between said first fiber optic plate and said detector.
An imaging device comprising first and second fiber optic plates and an optical detector, wherein:
- said optical detector defines an input face;
- said first fiber optic plate defines an input face and an output face;
- said output face of said first fiber optic plate is optically coupled to said input face of said optical detector;
- said second fiber optic plate defines an input face and an output face;
- said output face of said second fiber optic plate is optically coupled to said input face of said first fiber optic plate via a thixotropic optical coupling gel;
- and
- said input face of said second fiber optic plate is coated with an optical medium.
An imaging device comprising first and second fiber optic plates and an optical detector, wherein:
- said optical detector defines an input face;
- said first fiber optic plate defines an input face and an output face;
- said output face of said first fiber optic plate is optically coupled and bonded to said input face of said optical detector;
- said second fiber optic plate defines an input face and an output face;
- said input face of said second fiber optic plate is coated with an optical medium;
- said output face of said second fiber optic plate is optically coupled to said input face of said first fiber optic plate via an optical coupling gel;
- said optical coupling gel is configured to flow under a given shear rate;
- and
- said bond between said first fiber optic plate and said detector is configured to withstand a shear rate greater than said given shear rate at which said gel is configured to flow, enabling disengagement of said second fiber optic plate from said first fiber optic plate without substantial disturbance to the integrity of the bond between said first fiber optic plate and said detector.
An imaging device comprising a fiber optic plate and an optical detector, wherein:
- said optical detector defines an input face;
- said fiber optic plate defines an input face and an output face;
- said output face of said first fiber optic plate is optically coupled to said input face of said optical detector via an optical coupling gel;
- said device further comprises a compression frame configured to maintain a given degree of compression on said thixotropic optical coupling gel between said first and second fiber optic plates;
- said optical coupling gel is configured to maintain a solid state when held under compression by said frame and liquefy when subject to increasing shear rates;
- and
- said device is configured such that said gel is held in compression without interference by any intervening structure present between said fiber optic plate and said input face of said detector.
Dependencies are inferred from the claim text.