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US 7,089,072 B2Granted
Semiconductor manufacturing fault detection and management system and method
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorTong Lung Chia
Life of this patent
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Abstract
The present disclosure provides a semiconductor manufacturing fault detection and management system and method for monitoring at least one manufacturing entity to detect state changes.
Claims31
A semiconductor manufacturing fault detection and management system, the system comprising:
- at least one manufacturing entity;
- a first monitoring entity connected to the manufacturing entity to identify a state change in the manufacturing entity and to generate a state change notification;
- and
- a second monitoring entity connected to the first monitoring entity and the manufacturing entity to receive the state change notification, determine whether the manufacturing entity experienced a state change, and issue a verified state change notification when the state change is determined in the manufacturing entity.
1 more element
A semiconductor manufacturing fault detection and management system, the system comprising:
- at least one manufacturing entity;
- a first monitoring entity connected to the manufacturing entity to identify a state change in the manufacturing entity and to generate a first monitoring entity state change notification;
- a second monitoring entity connected to the manufacturing entity and to the first monitoring entity to identify a state change in the manufacturing entity and to generate a second monitoring entity state change notification when a state change in the manufacturing entity is identified;
- a third monitoring entity connected to the manufacturing entity, to the first monitoring entity and to the second monitoring entity to identify a state change in the manufacturing entity and to generate a third monitoring entity state change notification;
- and
- a state change detection mechanism configured to monitor the first second and third state change notifications and generate a manufacturing entity state change notification when at least two of the monitoring entity state change notifications are detected.
3 more elements
A semiconductor manufacturing fault detection and management system, the system comprising:
- at least one manufacturing entity;
- a first monitoring entity connected to the manufacturing entity to identify a state change in the manufacturing entity and to generate a first monitoring entity state change notification;
- a second monitoring entity connected to the manufacturing entity and to the first monitoring entity to identify a state change in the manufacturing entity and to generate a second monitoring entity state change notification when a state change in the manufacturing entity is identified;
- and
- a state change detection mechanism configured to monitor the first and second state change notifications and generate a manufacturing entity state change notification when both of the monitoring entity state change notifications are detected.
2 more elements
A method to detect faults in at least one semiconductor manufacturing entity, the method comprising:
- monitoring, from a first location, the manufacturing entity to identify a state change in the manufacturing entity and to generate a first monitoring entity state change notification when a state change in the manufacturing entity is identified;
- monitoring, from a second location, the manufacturing entity to identify a state change in the manufacturing entity and to generate a second monitoring entity state change notification when a state change in the manufacturing entity is identified;
- generating a manufacturing entity state change notification when the first monitoring entity state change notification and second monitoring entity state change notifications are generated;
- and
- generating a monitoring malfunction notification when only one of the monitoring entity state change notifications are generated.
2 more elements
A method to detect faults in at least one semiconductor manufacturing entity, the method comprising:
- monitoring, from a first location, the manufacturing entity to identify a state change in the manufacturing entity and to generate a first monitoring entity state change notification when a state change in the manufacturing entity is identified;
- monitoring, from a second location, the manufacturing entity to verify a state change in the manufacturing entity when the first monitoring entity state change notification is generated;
- generating a verified manufacturing entity state change notification when the state change is verified;
- and
- generating a first monitoring entity malfunction notification when the monitoring entity state change is not verified.
2 more elements
Dependencies are inferred from the claim text.