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US 7,087,183 B2Granted
Method of using an etchant solution for removing a thin metallic layer
AssigneeInternational Business Machines Corporation
InventorPeter Beverley Powell Phipps
Life of this patent
Estimating the term…
Abstract
A method for removing a thin metallic layer using an etchant solution is provided for essentially eliminating undercutting in a thin metallic layer such as a seed layer in a magnetic recording head. The etchant solution has a suitable solvent additive such as glycerol or methyl cellulose. With suitable solvent additives, which generally increase solvent viscosity, lateral etching rates are similar to surface etch rates and undercutting is essentially eliminated.
Claims10
A method for removing a thin metallic layer, comprising:
- depositing a thin metallic layer;
- forming a first photoresist layer over said thin metallic layer;
- forming a pattern in said first photoresist layer exposing a portion of said thin metallic layer;
- electrodepositing a material onto exposed portion of said thin metallic layer;
- removing said first photoresist layer;
- forming a second photoresist layer over desired electrodeposited material leaving an exposed portion of said thin metallic layer;
- and,
- using an etchant solution to remove said exposed portion of said thin metallic layer wherein said etchant solution includes ferric ammonium sulfate dissolved in a solvent including water and glycerol.
5 more elements
A method for removing a thin metallic layer, comprising:
- depositing a thin metallic layer;
- forming a first photoresist layer over said thin metallic layer;
- forming a pattern in said first photoresist layer exposing a portion of said thin metallic layer;
- electrodepositing a material onto exposed portion of said thin metallic layer;
- removing said first photoresist layer;
- forming a second photoresist layer over desired electrodeposited material leaving an exposed portion of said thin metallic layer;
- and,
- using an etchant solution to remove said exposed portion of said thin metallic layer wherein said etchant solution includes ferric ammonium sulfate dissolved in a solvent including water and methyl cellulose.
5 more elements
Dependencies are inferred from the claim text.