Composition used in producing calcium-rich getter thin film
AssigneeSaes Getters S.P.A.
InventorsCorrado Carretti, Luca Toia
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Abstract
An improved getter device and method for forming a calcium-rich getter thin film in an electronic vacuum device is disclosed. The getter device includes a powder of a Ca—Ba—Al ternary alloy composed of between 53% and 56.8% by weight of aluminum, from 36% to 41.7% by weight of calcium and from 1.5% to 11% by weight of barium. The method allows the formation of a calcium-rich getter thin film with a substantially reduced amount of released hydrogen in the vacuum device.
Claims15
Vaporizing a powder
- of a Ca—Ba—Al ternary alloy composed of between 50% and 60% by weight of aluminum, between 30% and 45% by weight of calcium and between 1.5% and 15% by weight of barium within a sealed device under vacuum
- whereby the result is substantially reducing the amount of hydrogen released during a thin film coating process.
Ca—Ba—Al ternary alloys containing between 53% and 56.8% by weight of aluminum, between 36% and 41.7% by weight of calcium and between 1.5% and 11% by weight of barium.
Dependencies are inferred from the claim text.