Back to results
US 7,083,270 B2Granted
Piezoelectric element, ink jet head, angular velocity sensor, method for manufacturing the same, and ink jet recording apparatus
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsHideo Torii, Eiji Fujii, Atsushi Tomozawa, Akiko Murata, Ryoichi Takayama, Taku Hirasawa
Life of this patent
Estimating the term…
Abstract
In a piezoelectric element 20, a first electrode layer 2 made of an alloy of at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper and a noble metal is formed on a silicon substrate 1, and a piezoelectric layer 3 made of a rhombohedral or tetragonal perovskite oxide (e.g., PZT) is formed on the first electrode layer 2 so that the piezoelectric layer 3 is preferentially oriented along the (001) plane.
Claims17
A piezoelectric element, comprising:
- a first electrode layer;
- a piezoelectric layer provided on the first electrode layer;
- and a second electrode layer provided on the piezoelectric layer, wherein:
- the first electrode layer is made of an alloyed noble metal containing at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper;
- the piezoelectric layer is made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane;
- and
- a portion of the piezoelectric layer that is closer to the first electrode layer has a structure in which a (001)-oriented region extends over the at least one metal in a portion of a surface of the first electrode layer that is closer to the piezoelectric layer, and a cross-sectional area of the (001)-oriented region taken along a plane perpendicular to a thickness direction of the piezoelectric layer gradually increases in a direction away from the first electrode layer toward the second electrode layer;
- wherein the at least one metal forms a pattern in the first electrode to control a growth direction of the piezoelectric layer.
5 more elements
A piezoelectric element, comprising:
- a first electrode layer;
- a piezoelectric layer provided on the first electrode layer;
- and a second electrode layer provided on the piezoelectric layer, wherein:
- the first electrode layer is made of an alloyed noble metal containing at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper;
- the piezoelectric layer is made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane;
- an orientation control layer made of a cubic or tetragonal perovskite oxide that is preferentially oriented along a (100) or (001) plane is provided between the first electrode layer and the piezoelectric layer;
- and
- a portion of the orientation control layer that is closer to the first electrode layer has a structure in which a (100)- or (001)-oriented region extends over the at least one metal in a portion of a surface of the first electrode layer that is closer to the orientation control layer, and a cross-sectional area of the region in a direction perpendicular to a thickness direction gradually increases in a direction away from the first electrode layer toward the piezoelectric layer;
- wherein the at least one metal forms a pattern in the first electrode to control a growth direction of the orientation control layer.
6 more elements
An ink jet head, comprising:
- a piezoelectric element in which a first electrode layer, a piezoelectric layer and a second electrode layer are layered in this order;
- a vibration layer provided on one surface of the piezoelectric element that is closer to the second electrode layer;
- and a pressure chamber member bonded to one surface of the vibration layer that is away from the piezoelectric element and including a pressure chamber for storing ink therein, in which the vibration layer is displaced in a thickness direction by a piezoelectric effect of the piezoelectric layer of the piezoelectric element so as to discharge the ink out of the pressure chamber, wherein:
- the first electrode layer of the piezoelectric element is made of an alloyed noble metal containing at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper;
- the piezoelectric layer is made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane;
- and
- a portion of the piezoelectric layer that is closer to the first electrode layer has a structure in which a (001)-oriented region extends over the at least one metal in a portion of a surface of the first electrode layer that is closer to the piezoelectric layer, and a cross-sectional area of the (001)-oriented region taken along a plane perpendicular to a thickness direction of the piezoelectric layer gradually increases in a direction away from the first electrode layer toward the second electrode layer;
- wherein the at least one metal forms a pattern in the first electrode to control a growth direction of the piezoelectric layer.
5 more elements
An ink jet head, comprising:
- a piezoelectric element in which a first electrode layer, a piezoelectric layer and a second electrode layer are layered in this order;
- a vibration layer provided on one surface of the piezoelectric element that is closer to the second electrode layer;
- and a pressure chamber member bonded to one surface of the vibration layer that is away from the piezoelectric element and including a pressure chamber for storing ink therein, in which the vibration layer is displaced in a thickness direction by a piezoelectric effect of the piezoelectric layer of the piezoelectric element so as to discharge the ink out of the pressure chamber, wherein:
- the first electrode layer of the piezoelectric element is made of an alloyed noble metal containing at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper;
- the piezoelectric layer is made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane;
- an orientation control layer made of a cubic or tetragonal perovskite oxide that is preferentially oriented along a (100) or (001) plane is provided between the first electrode layer and the piezoelectric layer of the piezoelectric element;
- and
- a portion of the orientation control layer that is closer to the first electrode layer has a structure in which a (100)- or (001)-oriented region extends over the at least one metal in a portion of a surface of the first electrode layer that is closer to the orientation control layer, and a cross-sectional area of the region in a direction perpendicular to a thickness direction gradually increases in a direction away from the first electrode layer toward the piezoelectric layer;
- wherein the at least one metal forms a pattern in the first electrode to control a growth direction of the orientation control layer.
6 more elements
An ink jet head, comprising:
- a piezoelectric element in which a first electrode layer, a piezoelectric layer and a second electrode layer are layered in this order;
- a vibration layer provided on one surface of the piezoelectric element that is closer to the first electrode layer;
- and a pressure chamber member bonded to one surface of the vibration layer that is away from the piezoelectric element and including a pressure chamber for storing ink therein, in which the vibration layer is displaced in a thickness direction by a piezoelectric effect of the piezoelectric layer of the piezoelectric element so as to discharge the ink out of the pressure chamber, wherein:
- the first electrode layer of the piezoelectric element is made of an alloyed noble metal containing at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper;
- the piezoelectric layer is made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane;
- and
- a portion of the piezoelectric layer that is closer to the first electrode layer has a structure in which a (001)-oriented region extends over the at least one metal in a portion of a surface of the first electrode layer that is closer to the piezoelectric layer, and a cross-sectional area of the (001)-oriented region taken along a plane perpendicular to a thickness direction of the piezoelectric layer gradually increases in a direction away from the first electrode layer toward the second electrode layer;
- wherein the at least one metal forms a pattern in the first electrode to control a growth direction of the piezoelectric layer.
5 more elements
An ink jet head, comprising:
- a piezoelectric element in which a first electrode layer, a piezoelectric layer and a second electrode layer are layered in this order;
- a vibration layer provided on one surface of the piezoelectric element that is closer to the first electrode layer;
- and a pressure chamber member bonded to one surface of the vibration layer that is away from the piezoelectric element and including a pressure chamber for storing ink therein, in which the vibration layer is displaced in a thickness direction by a piezoelectric effect of the piezoelectric layer of the piezoelectric element so as to discharge the ink out of the pressure chamber, wherein:
- the first electrode layer of the piezoelectric element is made of an alloyed noble metal containing at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper;
- the piezoelectric layer is made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane;
- an orientation control layer made of a cubic or tetragonal perovskite oxide that is preferentially oriented along a (100) or (001) plane is provided between the first electrode layer and the piezoelectric layer of the piezoelectric element;
- and
- a portion of the orientation control layer that is closer to the first electrode layer has a structure in which a (100)- or (001)-oriented region extends over the at least one metal in a portion of a surface of the first electrode layer that is closer to the orientation control layer, and a cross-sectional area of the region in a direction perpendicular to a thickness direction gradually increases in a direction away from the first electrode layer toward the piezoelectric layer;
- wherein the at least one metal forms a pattern in the first electrode to control a growth direction of the orientation control layer.
6 more elements
An ink jet recording apparatus, comprising an ink jet head, the ink jet head including:
- a piezoelectric element in which a first electrode layer, a piezoelectric layer and a second electrode layer are layered in this order;
- a vibration layer provided on one surface of the piezoelectric element that is closer to the second electrode layer;
- and a pressure chamber member bonded to one surface of the vibration layer that is away from the piezoelectric element and including a pressure chamber for storing ink therein, the ink jet head being capable of being relatively moved with respect to a recording medium, in which while the ink jet head is moved with respect to the recording medium, the vibration layer is displaced in a thickness direction by a piezoelectric effect of the piezoelectric layer of the piezoelectric element in the ink jet head so as to discharge the ink out of the pressure chamber through a nozzle hole communicated to the pressure chamber onto the recording medium, thereby recording information, wherein:
- the first electrode layer of the piezoelectric element in the ink jet head is made of an alloyed noble metal containing at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper;
- the piezoelectric layer is made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane;
- and
- a portion of the piezoelectric layer that is closer to the first electrode layer has a structure in which a (001)-oriented region extends over the at least one metal in a portion of a surface of the first electrode layer that is closer to the piezoelectric layer, and a cross-sectional area of the (001)-oriented region taken along a plane perpendicular to a thickness direction of the piezoelectric layer gradually increases in a direction away from the first electrode layer toward the second electrode layer;
- wherein the at least one metal forms a pattern in the first electrode to control a growth direction of the piezoelectric layer.
5 more elements
An ink jet recording apparatus, comprising an ink jet head, the ink jet head including:
- a piezoelectric element in which a first electrode layer, a piezoelectric layer and a second electrode layer are layered in this order;
- a vibration layer provided on one surface of the piezoelectric element that is closer to the second electrode layer;
- and a pressure chamber member bonded to one surface of the vibration layer that is away from the piezoelectric element and including a pressure chamber for storing ink therein, the ink jet head being capable of being relatively moved with respect to a recording medium, in which while the ink jet head is moved with respect to the recording medium, the vibration layer is displaced in a thickness direction by a piezoelectric effect of the piezoelectric layer of the piezoelectric element in the ink jet head so as to discharge the ink out of the pressure chamber through a nozzle hole communicated to the pressure chamber onto the recording medium, thereby recording information, wherein:
- the first electrode layer of the piezoelectric element in the ink jet head is made of an alloyed noble metal containing at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper;
- the piezoelectric layer is made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane;
- an orientation control layer made of a cubic or tetragonal perovskite oxide that is preferentially oriented along a (100) or (001) plane is provided between the first electrode layer and the piezoelectric layer of the piezoelectric element of the ink jet head;
- and
- a portion of the orientation control layer that is closer to the first electrode layer has a structure in which a (100)- or (001)-oriented region extends over the at least one metal in a portion of a surface of the first electrode layer that is closer to the orientation control layer, and a cross-sectional area of the region in a direction perpendicular to a thickness direction gradually increases in a direction away from the first electrode layer toward the piezoelectric layer;
- wherein the at least one metal forms a pattern in the first electrode to control a growth direction of the orientation control layer.
6 more elements
An ink jet recording apparatus, comprising an ink jet head, the ink jet head including:
- a piezoelectric element in which a first electrode layer, a piezoelectric layer and a second electrode layer are layered in this order;
- a vibration layer provided on one surface of the piezoelectric element that is closer to the first electrode layer;
- and a pressure chamber member bonded to one surface of the vibration layer that is away from the piezoelectric element and including a pressure chamber for storing ink therein, the ink jet head being capable of being relatively moved with respect to a recording medium, in which while the ink jet head is moved with respect to the recording medium, the vibration layer is displaced in a thickness direction by a piezoelectric effect of the piezoelectric layer of the piezoelectric element in the ink jet head so as to discharge the ink out of the pressure chamber through a nozzle hole communicated to the pressure chamber onto the recording medium, thereby recording information, wherein:
- the first electrode layer of the piezoelectric element in the ink jet head is made of an alloyed noble metal containing at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper;
- the piezoelectric layer is made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane;
- and
- a portion of the piezoelectric layer that is closer to the first electrode layer has a structure in which a (001)-oriented region extends over the at least one metal in a portion of a surface of the first electrode layer that is closer to the piezoelectric layer, and a cross-sectional area of the (001)-oriented region taken along a plane perpendicular to a thickness direction of the piezoelectric layer gradually increases in a direction away from the first electrode layer toward the second electrode layer;
- wherein the at least one metal forms a pattern in the first electrode to control a growth direction of the piezoelectric layer.
5 more elements
An ink jet recording apparatus, comprising an ink jet head, the ink jet head including:
- a piezoelectric element in which a first electrode layer, a piezoelectric layer and a second electrode layer are layered in this order;
- a vibration layer provided on one surface of the piezoelectric element that is closer to the first electrode layer;
- and a pressure chamber member bonded to one surface of the vibration layer that is away from the piezoelectric element and including a pressure chamber for storing ink therein, the ink jet head being capable of being relatively moved with respect to a recording medium, in which while the ink jet head is moved with respect to the recording medium, the vibration layer is displaced in a thickness direction by a piezoelectric effect of the piezoelectric layer of the piezoelectric element in the ink jet head so as to discharge the ink out of the pressure chamber through a nozzle hole communicated to the pressure chamber onto the recording medium, thereby recording information, wherein:
- the first electrode layer of the piezoelectric element in the ink jet head is made of an alloyed noble metal containing at least one metal selected from the group consisting of cobalt, nickel, iron, manganese and copper;
- the piezoelectric layer is made of a rhombohedral or tetragonal perovskite oxide that is preferentially oriented along a (001) plane;
- an orientation control layer made of a cubic or tetragonal perovskite oxide that is preferentially oriented along a (100) or (001) plane is provided between the first electrode layer and the piezoelectric layer of the piezoelectric element of the ink jet head;
- and
- a portion of the orientation control layer that is closer to the first electrode layer has a structure in which a (100)- or (001)-oriented region extends over the at least one metal in a portion of a surface of the first electrode layer that is closer to the orientation control layer, and a cross-sectional area of the region in a direction perpendicular to a thickness direction gradually increases in a direction away from the first electrode layer toward the piezoelectric layer;
- wherein the at least one metal forms a pattern in the first electrode to control a growth direction of the orientation control layer.
6 more elements
Dependencies are inferred from the claim text.