Method, system and medium for process control for the matching of tools, chambers and/or other semiconductor-related entities

A computer program product residing on a computer readable medium the computer program product comprising instructions for enabling a computer to:

• (A) collect data representative of one or more behaviors of at least one of one or more semi-conductor processing entities, said one or more behaviors being collected in the course of the one or more semi-conductor processing entities converging to, or attempting to maintain proximity with a target setting;
• and
• (B) share information, relating to the data representative of the one or more behaviors, between at least one of the one or more semi-conductor processing entities and at least one comparably configured semi-conductor processing entity, wherein the information facilitates the at least one comparably configured semi-conductor processing entity receiving the information to adjust a recipe that enables the at least one comparably configured semi-conductor processing entity to converge to, or attempt to maintain proximity with the target setting.

A computer-implemented system of converging, to a target setting, processing results generated by comparatively configured process tools operating in parallel in a semiconductor processing environment, said system comprising:

• a module controller containing module level models for setting at least one process tool results target;
• each of said comparatively configured process tools configured in parallel and communicating with said module controller, each of said comparatively configured process tools comprising an automatic process control module that receives as input from said module controller a module level model, wherein at least one of said respective automatic process control modules adjust at least one recipe processing parameter based on shared information from another automatic process control module to enable at least one of said comparatively configured process tools to converge to or maintain a respective process tool results target.