Apparatus and method for inspecting pattern

An apparatus for inspecting defects, comprising:

• a table which mounts a specimen to be inspected and which is movable in a plane;
• an ultraviolet light source for emitting ultraviolet light;
• an illuminating unit for illuminating the specimen mounted on the table with light emitted from the ultraviolet light source;
• a detecting unit for forming an image of the specimen illuminated by the illuminating unit and detecting the image with an image sensor;
• an image processing unit for processing the image detected by the image sensor and outputting information about defects detected on the specimen;
• and
• a container which covers the illuminating unit and the detecting unit and which includes an inlet and outlet of clean gas so as to maintain a clean environment within the container;
• wherein the illuminating unit and the detecting unit are disposed within the clean environment and are separated from outside by a wall of the container, and the table and the ultraviolet light source are disposed on the outside of the wall of the container.