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AssigneeCanon Kabushiki Kaisha
InventorsNobuhiro Yasui, Tohru Den, Kazuhiko Fukutani
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With regard to a function device formed by filling a porous structure with a functional material and a method for manufacturing the functional device, a technique for realizing a structure on a nanometer scale is not fully established. However, a method for manufacturing a function device characterized by including a step of providing a structure including columnar members and an area surrounding the columnar members, a step of removing the columnar members from the structure to form a porous body and a step of filling the porous body with a functional material allows various types of function device to be provided.
A function device characterized by being obtained by incorporating a filling material into a porous body obtained by removing columnar members from a structure comprised of said columnar members and an area surrounding each of said columnar members, wherein said area is made of an amorphous Si, or an amorphous SixGe1-x(0<x<1), the average distance between said columnar members is 30 nm or less and wherein the length in the depth direction of columnar pores of said porous body is substantially equal to the thickness of the area surrounding said pores.
An article comprising a filling material and a porous body, wherein said porous body includes a plurality of columnar pores and said porous body is an amorphous Si, or an amorphous SixGe1-x(0<x,1), the average distance between centers of said pores is 30 nm or less and the length in the depth direction of the columnar pores is substantially equal to the thickness of an area surrounding the columnar pores.
An article comprising a plurality of columnar members and an area surrounding the members,
An article comprising a filling material and a porous body, wherein said porous body includes a plurality of columnar pores and said porous body is an amorphous Ge, the average distance between centers of said pores is 30 nm or less and the length in the depth direction of the columnar pores is substantially equal to the thickness of an area surrounding the columnar pores.
An article comprising a porous body and a filling material incorporated into said porous body, wherein said porous body includes a plurality of columnar pores and said porous body is an amorphous silicon oxide, amorphous SixGe1-x(0<x<1) oxide or an amorphous germanium oxide, and the average distance between centers of pores is 30 nm or less, said porous body contains aluminum and wherein the amount of aluminum contained in said porous body is 1 to 20 atomic %.
A perpendicular magnetic recording medium comprising a filling material and a porous body, wherein said porous body includes a plurality of columnar pores and said porous body is an amorphous Si, or an amorphous SixGe1-x(0<x<1), the average distance between centers of said pores is 30 nm or less, and said filling material includes a magnetic material.
An article comprising a filling material and a porous body, wherein said porous body includes a plurality of columnar pores and said porous body is an amorphous Si, or an amorphous SixGe1-x(0<x<1), the average distance between centers of said pores is 30 nm or less and said porous body contains aluminum.
A perpendicular magnetic recording medium comprising a porous body and a filling material incorporated into said porous body, wherein said porous body includes a plurality of columnar pores and said porous body is an amorphous silicon oxide, amorphous SixGe1-x(0<x<1) oxide or an amorphous germanium oxide, and the average distance between centers of pores is 30 nm or less, said porous body contains aluminum, and said filling material includes a magnetic material.
An article comprising a porous body and a filling material incorporated into said porous body, wherein said porous body includes a plurality of columnar pores and said porous body is an amorphous silicon oxide, amorphous SixGe1-x(0<x<1) oxide or an amorphous germanium oxide, the average distance between centers of pores is 30 nm or less, said porous body contains aluminum and the length in the depth direction of columnar pores of said porous body is substantially equal to the thickness of an area surrounding the pores.
Dependencies are inferred from the claim text.