# US 7,079,321 B2 · Illumination system and method allowing for varying of both field height and pupil > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,079,321 B2 - Document ID: US7079321B2 - Status: Granted - Kind: B2 - Application number: 10/812,978 - Filed: 2004-03-31 - Published: 2005-01-13 - Granted: 2006-07-18 - Earliest claimed: 2001-10-18 - Assignees: ASML Holding N.V. - Inventors: Scott D. Coston; Richard J. Guerra - Web page: https://patentgrep.com/patent/US7079321B2 ## CPC - G03F 7/70158: {Diffractive optical elements} - G03F 7/70183: {Zoom systems for adjusting beam diameter} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract A method and system allow for changing (continuously or variably) both a field height and pupil of a beam that illuminates an object field. In one example, the object field can have a pattern generator (e.g., one or more reticles, spatial light modulators, or the like) positioned therein. The system and method for changing both the field height and the pupil can include a field defining element, a pupil defining element, and first and second zoom systems. The field defining element (FDE) can generate a field height of an illumination beam. The first zoom system can allow for changing of the field height of the illumination beam. The pupil defining element (PDE) can generate a pupil of the illumination beam. The second zoom system can allow for changing of the pupil of the illumination beam. ## Claims ### Claim 1 A system comprising: a field defining element (FDE) that generates a field height of an illumination beam; a first zoom system that allows for changing of the field height of the illumination beam; a pupil defining element (PDE) that generates a pupil of the illumination beam; and a second zoom system that allows for changing of the pupil of the illumination beam, whereby the illumination beam is used to illuminate an object plane. ### Claim 2 (depends on 1) The system of claim 1, wherein: the FDE and the PDE are diffractive optical elements. ### Claim 3 (depends on 1) The system of claim 1, wherein: the FDE and the PDE are refractive optical elements. ### Claim 4 (depends on 1) The system of claim 1, further comprising: a relay system positioned before the object plane. ### Claim 5 (depends on 1) The system of claim 1, further comprising: a beam homodigization device positioned so that the illumination beam is homogenized before being received by either the FDE or the PDE. ### Claim 6 (depends on 1) The system of claim 1, wherein the FDE is positioned closer to the object plane than the PDE. ### Claim 7 (depends on 1) The system of claim 1, wherein the PDE is positioned closer to the object plane than the FDE. ### Claim 8 (depends on 1) The system of claim 1, further comprising a pattern generator positioned in the object plane. ### Claim 9 (depends on 1) The system of claim 1, further comprising one of a reticle, a contrast device, and a spatial light modulator positioned in the object plane. ### Claim 10 (depends on 1) The system of claim 1, further comprising a reflective pattern generator positioned in the object plane. ### Claim 11 (depends on 1) The system of claim 1, further comprising a transmissive pattern generator positioned in the object plane. ### Claim 12 (depends on 1) The system of claim 1, wherein the first zoom system changes the field height up to about 2.5 times to about 4 times an original field height. ### Claim 13 (depends on 1) The system of claim 1, wherein the second zoom system changes the pupil up to about 4 times to about 5 times an original pupil. ### Claim 14 (depends on 1) The system of claim 1, further comprising: a detection system that measures a wavefront of the illumination beam, which is used to control a zoom value for at least one of the first and second zoom systems. ### Claim 15 (depends on 1) The system of claim 1, further comprising: a detection system that measures a characteristic of the illumination beam, which is used to control a zoom value for at least one of the first and second zoom systems. ### Claim 16 A system comprising: means for generating and varying a field height of an illumination beam; and means for generating and varying a pupil of the illumination beam, such that illumination associated with the pupil has different optical characteristics than illumination associated with the field height and such that radiometric efficiency is continuously maintained. ### Claim 17 (depends on 16) The system of claim 16, further comprising: means for relaying the illumination beam. ### Claim 18 (depends on 16) The system of claim 16, further comprising: means for measuring a characteristic of the illumination beam and generating a control signal; and means for controlling at least one of the means for varying the field height and the means for varying the pupil based on a value of the control signal. ### Claim 19 A method comprising: (a) generating a field height of an illumination beam; (b) varying the field height of the illumination beam; (c) generating a pupil of the illumination beam; and (b) varying the pupil of the illumination beam, such that illumination associated with the pupil has different optical characteristics than illumination associated with the field height and radiometric efficiency is maintained. ### Claim 20 (depends on 19) The system of claim 19, further comprising: (c) relaying the illumination beam. ### Claim 21 (depends on 19) The system of claim 19, further comprising: (c) measuring a characteristic of the illumination beam; (d) generating a control signal based on the measuring; and (e) controlling at least one of steps (a) or (b) based on a value of the control signal. ### Claim 22 (depends on 16) The system of claim 16, wherein the different illumination characteristics comprise at least one of different numerical apertures and different magnifications. ### Claim 23 (depends on 19) The method of claim 19, wherein the different illumination characteristics comprise at least one of different numerical apertures and different magnifications.