Dual ID verification system and switching method therefor
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsJui-An Shin, Shun-An Chen, Ko-Pin Chang, Hui-Tang Liu, James You
Life of this patent
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Abstract
A method for switch dual Id verification systems for installing another carrier ID system on an equipment installation complying with SEMI E87. A first identification access system has internally installed on an equipment installation on which a second identification access system is then installed. Both systems are switched using a control flow and a wafer carrier ID is obtained by the chosen verification system.
Claims18
A method for switching dual ID verification system, comprising steps of:
- installing a first identification access system and a second identification access system on an equipment installation;
- setting a product variable;
- choosing the first identification access system or the second identification access system by a switch method;
- sending an access request via a first wire link to instruct an equipment installation controller for the first identification access system to read the wafer carrier ID from a first identification access device if the first identification access system is chosen;
- receiving of the wafer carrier ID through the first identification access system by a host;
- and
- retrieving the wafer carrier ID through the second identification access system by a host via a second wire link if the second identification access system is chosen.
A dual ID verification system comprising:
- a first identification access device for storing a wafer carrier id;
- a second identification access device for storing the wafer carrier id;
- an equipment controller for receiving an access request from the equipment;
- a host, coupled with the equipment installation controller, comprising a product ID table, for retrieving the wafer carrier id, the product ID table having a plurality of product ID numbers;
- and
- a control flow unit, coupled with the first identification access device, the second identification access device, the equipment installation controller, and the host, for choosing the first identification access system or the second identification access system installed on an equipment installation by a switch method, sending an access request via a first wire link to inform the equipment installation controller for the first identification access system to read the wafer carrier ID from a first identification access device if the first identification access system is chosen, retrieving the wafer carrier ID through the first identification access system by a host and retrieving the wafer carrier ID through the second identification access system by a host via a second wire link if the second identification access system is chosen.
A dual ID verification system comprising:
- a control flow unit for choosing the first identification access system or the second identification access system installed on an equipment installation by a switch method, sending an access request via a first wire link to instruct an equipment installation controller for the first identification access system to read the wafer carrier ID from a first identification access device if the first identification access system is chosen, retrieving the wafer carrier ID through the first identification access system by a host, and retrieving the wafer carrier ID through the second identification access system by a host via a second wire link if the second identification access system is chosen.
Dependencies are inferred from the claim text.