Back to results
US 7,075,700 B2Granted
Mirror actuator position sensor systems and methods
AssigneeThe Boeing Company
InventorSteven E. Muenter
Life of this patent
Estimating the term…
Abstract
Systems and methods are disclosed herein to provide position information, such as for example via a mirror actuator position sensor. For example, in accordance with an embodiment of the present invention, a mirror actuator is disclosed which utilizes its own capacitance to directly sense and provide mirror position information. The mirror position information may be utilized as a position feedback signal to assist in controlling a position of the mirror.
Claims20
A mirror system comprising:
- a mirror;
- a mirror actuator circuit having an electrode to control a position of the mirror, wherein a capacitance between the electrode and the mirror is measured to determine a position of the mirror, and wherein the mirror actuator circuit comprises:
- an amplifier circuit adapted to provide a first voltage signal to the electrode to provide an electrostatic force to control the position of the mirror;
- a measurement circuit adapted to measure the capacitance between the electrode and the mirror and provide a measured mirror position signal;
- a difference circuit adapted to receive a mirror position command and the measured mirror position signal and provide a mirror position error signal to the amplifier circuit;
- and
- a memory adapted to store linearized values to provide to the difference circuit based on the measured mirror position signal to compensate for non-linear relationships.
4 more elements
A mirror actuator system comprising:
- a mirror;
- a plurality of electrodes associated with the mirror;
- and
- a plurality of mirror actuator circuits corresponding to the plurality of electrodes, the mirror actuator circuits adapted to provide a corresponding first signal to the corresponding electrodes to control a position of the mirror and further adapted to measure a corresponding capacitance between the corresponding electrodes and the mirror to provide a corresponding measured mirror position;
- wherein the mirror actuator circuits each comprises:
- an amplifier adapted to provide a high voltage signal to the electrode to generate an electrostatic force to act on the mirror;
- a capacitance measurement circuit adapted to measure the capacitance between the electrode and the mirror and provide a measured mirror position signal;
- an isolation capacitor adapted to isolate the amplifier from the capacitance measurement circuit;
- and
- a feedback circuit adapted to compare the measured mirror position signal and a mirror position command and provide a mirror position error signal to the amplifier.
7 more elements
A method of determining a position of a mirror, the method comprising:
- providing an electrostatic actuator adapted to control a position of the mirror;
- providing a drive signal to the electrostatic actuator to control the position of the mirror;
- measuring a capacitance between the electrostatic actuator and the mirror;
- isolating the providing of the drive signal from the measuring of the capacitance;
- converting the capacitance measured to a measured mirror position;
- comparing the measured mirror position to a commanded mirror position to generate a position error;
- providing the position error as a feedback signal for the providing of the drive signal to correct the position error of the mirror;
- and
- storing linearized values to compensate the measured mirror position for a non-linear relationship between the capacitance measured and the measured mirror position.
6 more elements
Dependencies are inferred from the claim text.