Charged particle deflecting system
AssigneeICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
InventorsPavel Adamec, Harry Munack
Life of this patent
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Abstract
The invention provides a deflecting system for deflecting a charged particle beam from a first direction to a second direction, the deflecting system comprising a first deflector for deflecting said charged particle beam off the first direction within a first deflection plane; a second deflector for deflecting the deflected charged particle beam into the second direction within the first deflection plane; and at least one deflecting pair of correcting coils comprising two correction coils which is positioned and shaped to reduce an astigmatism of the charged particle beam caused by the deflections.
Claims43
A deflecting system for deflecting a charged particle beam from a first direction to a second direction, the deflecting system comprising:
- a first deflector for deflecting said charged particle beam off the first direction within a first deflection plane;
- a second deflector for deflecting the deflected charged particle beam into the second direction within the first deflection plane;
- and
- at least one deflecting pair of correcting coils which is positioned and shaped to deflect the charged particle beam and to reduce an astigmatism of the charged particle beam caused by the deflections wherein the correcting coils are positioned and shaped to generate a dipole field and a hexapole field;
- wherein the correcting coils are positioned and shaped to generate a dipole field and a hexapole field.
A deflecting system for deflecting a charged particle beam from a first direction to a second direction, the deflecting system comprising:
- a first magnetic deflector for deflecting said charged particle beam from the first direction;
- and
- a second magnetic deflector for deflecting the deflected clmrged particle beam into the second direction, wherein at least one first and second of the magnetic deflectors comprises a pair of saddle-like deflecting coils having an opening angle between 121 degrees and 124 degrees.
A deflecting system for deflecting a charged particle beam from a first direction to a second direction, the deflecting system comprising:
- a first magnetic deflector for deflecting said charged particle beam of the first direction;
- and
- a second magnetic deflector for deflecting the deflected charged particle beam into the second direction, wherein at least one of the first and second magnetic deflectors comprises of a pair of toroidal deflecting coils having an opening angle between 56 degrees and 59 degrees.
A two-dimensional deflecting system comprising:
- a first deflecting system for deflecting a charged particle beam from a first direction to a second direction comprising a first deflector for deflecting said charged particle beam off the first direction within a first deflection plane, a second deflector for deflecting the deflected charged particle beam into the second direction within the first deflection plane, and at least one deflecting pair of correcting coils which is positioned and shaped to deflect the charged particle beam and to reduce astigmatism of the charged particle beam caused by the deflections wherein the correcting coils are positioned and shaped to generate a dipole field and a hexapole field;
- wherein the correcting coils are positioned and shaped to generate a dipole field and a hexapole field;
- and
- a second deflecting system for deflecting the charged particle beam within a second deflection plane from the first direction to a third direction;
- wherein the second deflection plane is orthogonal to the first deflection plane within 45 degrees.
The two-dimensional deflecting system according to 30, wherein the first direction and the third direction are substantially equal.
A charged particle beam device, comprising:
- a charged particle beam source to generate a charged particle beam;
- and
- a first deflecting system for deflecting the charged particie beam from a first direction to a second direction comprising a first deflector for deflecting said charged particle beam off the first direction within a first deflection plane, a second deflector for deflecting the deflected charged particle beam into the second direction within the first deflection plane, and at least one deflecting pair of correcting coils which is positioned and shaped to deflect the charged particle beam and to reduce astigmatism of the charged particle beam caused by the deflections wherein the correcting coils are positioned and shaped to generate a dipole field and a hexapole field;
- wherein the correcting coils are positioned and shaped to generate a dipole field and a hexapole field.
Dependencies are inferred from the claim text.