Porous valve assembly
AssigneeMKS Instruments, Inc.
InventorsAli Shajii, Ronald W. Collins, Jr., Matthew Besen
Life of this patent
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AssigneeMKS Instruments, Inc.
InventorsAli Shajii, Ronald W. Collins, Jr., Matthew Besen
Estimating the term…
A valve assembly for controlling the flow of a predetermined fluid, including a tube having an open end forming an outlet port, and wherein the tube is made of a material that is porous with respect to the predetermined fluid, an outer wall forming a fluid chamber coaxially surrounding the porous tube and including an inlet port, and a valve member made of non-porous material received for sliding movement within the porous tube. Sliding movement of the valve member within the tube and towards the open end of the tube reduces the flow of the predetermined fluid from the fluid chamber, through the porous tube and through the outlet of the valve assembly, while sliding movement of the valve member within the tube and away from the open end of the tube increases the flow of the predetermined fluid from the fluid chamber, through the porous tube and through the outlet of the valve assembly.
A valve assembly for controlling the flow of a predetermined fluid, comprising:
Dependencies are inferred from the claim text.