System and method for multi-project wafer shuttle service
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsJen-Lin Chao, Chin Yung Chang
Life of this patent
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Abstract
A system and method for MPW shuttle service. The system includes at least a first MPW shuttle reserving for a first group of device designs, a second MPW shuttle reserving for a second group of device designs, and a checking unit. The checking unit determines whether mask data for the first group has been provided by a cut off date for the first MPW shuttle, and exchanges a first target device design from the first group with a second target device design from the second group if the mask data of the first target device design has not been provided and that of the second target device design has been provided by the cut off date.
Claims33
A system for MPW (multi-project wafer) shuttle service, comprising:
- a first MPW shuttle reserving for a first group of device designs;
- a second MPW shuttle reserving for a second group of device designs;
- and
- a checking unit to determine whether mask data for the first group has been provided by a cut off date for the first MPW shuttle, and to exchange a first target device design from the first group with a second target device design from the second group if the mask data of the first target device design has not been provided and that of the second target device design has been provided by the cut off date.
A method for MPW (multi-project wafer) shuttle service, comprising the steps of:
- determining whether device design mask data for a first group reserved on a first MPW shuttle has been provided by a cut off date for the first MPW shuttle;
- and
- exchanging a first target device design from the first group with a second target device design from a second group reserved on a second MPW shuttle if the mask data of the first target device design has not been provided and that of the second target device design has been provided by the cut off date.
A machine-readable storage medium storing a computer program which when executed causes a computer to perform a method of MPW (multi-project wafer) shuttle service, comprising the steps of:
- determining whether device design mask data for a first group reserved on a first MPW shuttle has been provided by a cut off date for the first MPW shuttle;
- and
- exchanging a first target device design from the first group with a second target device design from a second group reserved on a second MPW shuttle if the mask data of the first target device design has not been provided and that of the second target device design has been provided by the cut off date.
A system for MPW (multi-project wafer) shuttle service, comprising:
- a first MPW shuttle reserving for a first group of device designs;
- a second target device design having a pull-in demand;
- and
- a checking unit to determine whether mask data from the first group has been provided by a cut off date for the first MPW shuttle, and to exchange a first target device design from the first group with the second target device design if the mask data of the first target device design has not been provided and that of the second target device design has been provided by the cut off date.
A method for MPW (multi-project wafer) shuttle service, comprising the steps of:
- determining whether device design mask data from a first group reserved on a first MPW shuttle has been provided by a cut off date for the first MPW shuttle;
- and
- exchanging a first target device design from the first group with a second target device design having a pull-in demand if the mask data for the first target device design has not been provided and that of the second target device design has been provided by the cut off date.
A machine-readable storage medium storing a computer program which when executed causes a computer to perform a method of MPW (multi-project wafer) shuttle service, comprising the steps of:
- determining whether device design mask data from a first group reserved on a first MPW shuttle has been provided by a cut off date for the first MPW shuttle;
- and
- exchanging a first target device design from the first group with a second target device design having a pull-in demand if the mask data of the first target device design has not been provided and that of the second target device design has been provided by the cut off date.
Dependencies are inferred from the claim text.