Wiring diagram verifying method, program, and apparatus

A program for allowing a computer to execute:

• a layer defining step wherein different layer numbers are defined to diagram data of oblique wirings and data of via cell diagrams which are included in layout data of a semiconductor integrated circuit design;
• a first diagram blending step wherein diagram data including the oblique wiring diagrams and the via cell diagrams is fetched from said layout data and the diagrams are blended every same layer number;
• an oblique wiring verifying step wherein the oblique wiring diagrams blended in said first diagram blending step are verified;
• a second diagram blending step wherein the oblique wiring diagram blended in said first diagram blending step and said via cell diagrams are blended, thereby forming an oblique wiring mask diagram;
• and
• a blended diagram verifying step wherein the oblique wiring mask diagram blended in said second diagram blending step is verified.

A computer-aided wiring diagram verifying apparatus for forming diagram data for a wiring mask including oblique wirings and via cells which are arranged on the oblique wirings from layout data of a semiconductor integrated circuit design, comprising:

• a layer defining unit which defines different layer numbers to oblique wiring diagrams and via cell diagrams which are included in the layout data of the semiconductor integrated circuit design;
• a first diagram blending unit which fetches diagram data including the oblique wiring diagrams and the via cell diagrams from said layout data and blends the diagrams every same layer number;
• an oblique wiring verifying unit which verifies the oblique wiring diagrams blended by said first diagram blending unit;
• a second diagram blending unit which blends the oblique wiring diagram blended by said first diagram blending unit and said via cell diagrams, thereby forming an oblique wiring mask diagram;
• and
• a blended diagram verifying unit which verifies the oblique wiring mask diagram blended by said second diagram blending unit.