US 7,072,578 B2 · Carbon wire heating object sealing heater and fluid heating apparatus using the same heater

Carbon wire heating object sealing heater and fluid heating apparatus using the same heater

AssigneesToshiba Ceramics Co., Ltd., Tokyo Electron Limited

InventorsNorihiko Saito, Hiroyuki Honma, Hiroshi Mori, Eiichi Toya, Tomio Konn, Tomohiro Nagata, Sunao Seko, Akira Otsu, Takanori Saito, Ken Nakao, Kazutoshi Miura, Harunari Hasegawa, George Hoshi, Katsutoshi Ishi

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Abstract

A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2×10−3 g/cm3 or less.

Claims4

Dependent claims

A carbon wire heating element sealing heater in which a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein

the quantity of water absorbed in the carbon wire heating element is 2×10−3 g or less per 1 cm3 of said carbon wire heating element.

Dependencies are inferred from the claim text.