US 7,072,442 B1 · X-ray metrology using a transmissive x-ray optical element

Abstract

An x-ray metrology system includes one or more transmissive x-ray optical elements, such as zone plates or compound refractive x-ray lenses, to shape the x-ray beams used in the measurement operations. Each transmissive x-ray optical element can focus or collimate a source x-ray beam onto a test sample. Another transmissive x-ray optical element can be used to focus reflected or scattered x-rays onto a detector to enhance the resolving capabilities of the system. The compact geometry of transmissive x-ray optical element allows for more flexible placement and positioning than would be feasible with conventional curved crystal reflectors. For example, multiple x-ray beams can be focused onto a test sample using a transmissive x-ray optical element array. Robust zone plates can be efficiently produced using a damascene process.

Claims12

Dependent claims

An x-ray metrology system comprising:

an x-ray source for simultaneously generating a first x-ray beam and a second x-ray beam, each originating from a different spatial location in the source;
a first zone plate for reshaping the first x-ray beam into a first reshaped beam portion, the first reshaped beam portion comprising a first plurality of converging x-rays focused onto a measurement spot on a first surface of a test sample;
and
a second zone plate for reshaping the second x-ray beam into a second reshaped beam portion, the second reshaped beam portion comprising a second plurality of converging x-rays focused onto the same measurement spot on the first surface of the test sample,
wherein the first and second zone plates are formed on a single substrate and simultaneously focus a same wavelength.

2 more elements

Dependencies are inferred from the claim text.

X-ray metrology using a transmissive x-ray optical element

Life of this patent

X-ray metrology using a transmissive x-ray optical element

Life of this patent

Abstract

Claims12