Magnetic memory having synthetic antiferromagnetic pinned layer
AssigneeMicron Technology, Inc.
InventorJames G. Deak
Life of this patent
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Abstract
A magnetic memory element includes a sense structure, a tunnel barrier adjacent the sense structure, and a synthetic antiferromagnet (SAF) adjacent the tunnel barrier on a side opposite the sense structure. The SAF includes an antiferromagnetic structure adjacent a ferromagnetic seed layer. The ferromagnetic seed layer provides a texture so that the antiferromagnetic structure deposited on the ferromagnetic seed layer has reduced pinning field dispersion.
Claims29
A magnetic memory element comprising:
- a sense structure;
- a tunnel barrier adjacent the sense structure;
- and
- a pinned structure adjacent the tunnel barrier on a side opposite the sense structure, the pinned structure including an antiferromagnetic structure adjacent a cobalt-free ferromagnetic seed layer, the cobalt-free ferromagnetic seed layer having minimized texture variations as compared to a ferromagnetic layer containing cobalt.
A method of producing a magnetic memory element, the method comprising:
- forming a sense structure;
- providing a tunnel barrier adjacent the sense structure;
- and
- providing a pinned structure adjacent the tunnel barrier on a side opposite the sense structure, the pinned structure including an antiferromagnetic structure provided adjacent a ferromagnetic layer, the ferromagnetic layer functioning to impart minimal textural variations on the antiferromagnetic structure.
A method of producing a magnetic memory element comprising:
- forming a pinning structure having a cobalt-free ferromagnetic layer with a texture having minimal variations;
- and
- forming an antiferromagnetic layer on the cobalt-free ferromagnetic layer.
A magnetic tunnel junction device having memory elements comprising:
- a sense structure;
- a tunnel barrier adjacent the sense structure;
- and
- a pinned structure adjacent the tunnel barrier on a side opposite the sense structure, the pinned structure including an antiferromagnetic structure adjacent a ferromagnetic structure, the ferromagnetic structure being free of cobalt and providing a texture having minimal variations, the ferromagnetic layer functioning to reduce dispersion of a pinning field of the antiferromagnetic structure as compared to an antiferromagnetic structure provided on a cobalt-containing ferromagnetic layer.
A magnetic memory including an array of memory elements, each memory element comprising a magnetic memory element including:
- a sense structure;
- a tunnel barrier adjacent the sense structure;
- and
- a pinned structure adjacent the tunnel barrier on a side opposite the sense structure, the pinned structure including an antiferromagnetic structure adjacent a non-cobalt containing ferromagnetic structure, the ferromagnetic structure being cobalt-free and providing a texture to the antiferromagnetic structure that reduces dispersion of a magnetic pining field as compared to an antiferromagnetic structure provided on a cobalt-containing ferromagnetic structure.
A processor system comprising:
- a processor;
- and
- a magnetic random access memory device for exchanging data with the processor, the memory device comprising an array of memory elements, each memory element comprising a magnetic memory element including:
- a sense structure;
- a tunnel barrier adjacent the sense structure;
- and
- a pinned structure adjacent the tunnel barrier on a side opposite the sense structure, the pinned structure including an antiferromagnetic structure adjacent a ferromagnetic structure, the ferromagnetic structure being cobalt-free and providing a surface having minimal texture variation to the antiferromagnetic structure.
A method of forming a magnetic tunnel junction element comprising:
- forming a sense structure;
- providing a tunnel barrier adjacent the sense structure;
- and
- providing a pinned structure adjacent the tunnel barrier on a side opposite the sense structure, the pinned structure including an antiferromagnetic structure provided adjacent a ferromagnetic structure, the ferromagnetic structure functioning to impart minimal textural variations on the antiferromagnetic structure.
A magnetic memory element comprising:
- a first layered structure with a magnetic moment orientation that can be changed;
- a second layered structure with a fixed magnetic moment orientation;
- and
- a barrier structure between the first and second layered structures, the second layered structure including:
- a cobalt-containing ferromagnetic layer that meets the barrier structure at a first interface at which tunneling magnetoresistance occurs;
- an antiferromagnetic layer;
- and
- a cobalt-free ferromagnetic layer between the cobalt-containing ferromagnetic layer and the antiferromagnetic layer, the cobalt-free ferromagnetic layer meeting the antiferromagnetic layer at a second interface having uniform crystallographic order.
A method of producing a magnetic memory element, the method comprising:
- forming a first layered structure with a magnetic moment orientation that can be changed;
- forming a barrier structure over the first layered structure;
- forming a cobalt-containing ferromagnetic layer on the barrier structure, the cobalt-containing ferromagnetic layer meeting the barrier structure at a first interface at which tunneling magnetoresistance occurs;
- forming a cobalt-free ferromagnetic layer over the cobalt-containing ferromagnetic layer;
- and
- forming an antiferromagnetic layer on the cobalt-free ferromagnetic layer, the antiferromagnetic layer meeting the cobalt-free ferromagnetic layer at a second interface having uniform crystallographic order;
- the cobalt-containing and cobalt-free ferromagnetic layers having a fixed magnetic moment orientation.
Dependencies are inferred from the claim text.