Addressing of an SLM
AssigneeMicronic Laser Systems AB
InventorsPeter Dürr, Ulric Llungblad
Life of this patent
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Abstract
The present invention relates to a method to reduce charging effects affecting a degree of movement of at least one movable micro mirror in a spatial light modulator, said at least one movable micro mirror is electrostatically attractable to at least one electrode, including the action of attracting electrostatically said at least one micro mirror in a sequence of reversed electrical field between said micro mirror and said at least one electrode.
Claims7
A method to reduce charging effects affecting a degree of deflection in at least one tilting micro mirror in a spatial light modulator (SLM), said at least one micro mirror is electrostatically attractable to at least one electrode, including the action of:
- attracting electrostatically said at least one micro mirrors in a sequence of reversed electrical field between said micro mirror and said at least one electrode, wherein said sequence of reversed electrical field is non-periodic.
A method to reduce charging effects affecting a degree of deflection in at least one tilting micro mirror in a spatial light modulator (SLM), said at least one micro mirror is electrostatically attractable to at least one electrode, including the actions of:
- attracting electrostatically said at least one micro mirrors in a sequence of reversed electrical field between said micro mirror and said at least one electrode;
- and
- deflecting said movable micro mirror in a sequence of clockwise and counter-clockwise movement
- wherein said sequence of clockwise and counter-clockwise movement is non-periodic.
A method to reduce charging effects affecting a degree of deflection of deflectable micro mirrors in a spatial light modulator, including the actions of:
- setting said deflectable micro mirrors in a desired deflection state,
- removing an electrical field between said micro mirror and at least one addressing electrode before impinging electromagnetic radiation onto said spatial light modulator.
Dependencies are inferred from the claim text.