US 7,071,969 B1 · Parameterized preview array for iterative image optimization in remote applications

Abstract

A method of adjusting focus and/or other image parameters in a remotely-operated image capturing system, such as a scanning electron microscope (SEM), is provided. The method minimizes transmission bandwidth and allows a remote user to perform adjustment quickly without requiring real-time feedback. In accordance with the method, rather than adjusting a knob or slider while viewing a real-time image as is done in prior art systems, the user selects among several still images representing a wide range of values of the adjustment in question. The user then selects from another set of images which represent a small subrange of values determined by the first choice. The process is repeated until the adjustment resolution of the instrument is reached or the user is satisfied. Adjustments, like objective lens alignment, which require “focus wobble” can also be made using this method. Since focus wobble is a periodic motion, it can be represented using a short loop of animation. This animation, when used in accordance with the present invention, can either be captured directly as a short burst of video or captured as a sequence of still images.

Claims3

Dependent claims

In a computer-controlled image capturing system that includes an imaging device that captures a live video image of a display object and a remote computer terminal connected to the imaging device to receive image data from the imaging device relating to the display object and to transmit control signals to the imaging device, a method of remotely adjusting an operating parameter of the imaging device, the method comprising:

(a) determining a parameter value range for the operating parameter;
(b) dividing the parameter value range into a plurality of operating parameter values,
(c) transmitting a parameter control signal from the remote computer terminal to the imaging device that causes the image capture system to capture a plurality of still images, each still image corresponding to the live video image captured when the imaging device is operating at a corresponding one of the plurality of operating parameter values;
(d) simultaneously displaying the plurality of still images,
(e) selecting a preferred still image from the plurality of displayed still images;
(f) determining an updated parameter value range for the operating parameter based upon the operating parameter value associated with the selected preferred still image;
(g) dividing the updated parameter value range into a plurality of updated operating parameter values;
(h) transmitting an updated parameter control signal from the remote computer terminal to the imaging device that causes the image capture system to capture a plurality of still images, each updated still image corresponding to the live video image captured when the imaging device is operating at a corresponding one of the plurality of updated operating parameter values;
(i) repeating steps (d)–(h) above with respect to iteratively updated operating parameter value ranges until a final still image is selected;
and
(j) transmitting a final parameter control signal from the remote computer terminal to the imaging device such that the imaging device captures a final live video image using the updated operating parameter control value associated with the selected final still image.

8 more elements

In a computer-controlled image capturing system that includes an imaging device that captures a live video image of a display object and a remote computer terminal connected to the imaging device to receive image data from the imaging device relating to the display object and to transmit control signals to the imaging device, a method of adjusting an operating parameter of the imaging device, the method comprising:

(a) determining a parameter value range for the operating parameter;
(b) dividing the parameter value range into a plurality of operating parameter values;
(c) transmitting a parameter control signal form the remote computer terminal to the imaging device that causes the image capture system to capture a plurality of video motion loops, each video motion loop corresponding to the live video image captured when the image device is operating at a corresponding one of the plurality of operating parameter values;
(d) simultaneously displaying the plurality of video motion loops;
(e) selecting a preferred video motion loop from the plurality of displayed video motion loops;
(f) determining an updated parameter value range for the operating parameter based upon the operating parameter value associated with the selected preferred video motion loop;
(g) dividing the updated parameter value range into a plurality of updated operating parameter values;
(h) transmitting an updated parameter control signal from the remote computer terminal to the imaging device that causes the image capture system to capture a plurality of video motion loops, each updated video motion loop corresponding to the live video image captured when the imaging device is operating at a corresponding one of the plurality of updated operating parameter values;
(i) repeating steps (d)–(h) above with respect to iteratively updated operating parameter value ranges until a final video motion loop is selected;
and
(j) transmitting a final parameter control signal from the remote computer terminal to the imaging device such that the imaging device captures a final live video image using the updated operating parameter control value associated with the selected final video motion loop.

8 more elements

In a computer-controlled image capturing system that includes an imaging device that captures a live video image of a display object and a remote computer terminal connected to the imaging device to received image data from the imaging device relating to the display object and to transmit control signals to the imaging device, a method of adjusting an operating parameter of the imaging device, the method comprising:

(a) determining a parameter value range for the operating parameter;
(b) dividing the parameter value range into a plurality of operating parameter values;
(c) transmitting a parameter control signal from the remote computer terminal to the imaging device that causes the image capture system to capture a plurality of still image sequences, each still image sequence corresponding to the live video image captured when the image device is operating at a corresponding one of the plurality of operating parameter values;
(d) assembling each of the plurality of still image sequences into a corresponding moving picture;
(e) simultaneously displaying the plurality of moving pictures;
(f) selecting a preferred moving picture from the plurality of moving pictures;
(g) determining an updated parameter value range for the operating parameter based upon the operating parameter value associated with the selected preferred moving picture;
(h) dividing the updated parameter value range into a plurality of updated operating parameter values;
(i) transmitting an updated parameter control signal from the remote computer terminal to the imaging device that causes the image capture system to capture an updated plurality of still image sequences, each updated still image sequence corresponding to the live video image captured when the imaging device is operating at a corresponding one of the plurality of updated operating parameter values;
(j) repeating steps (d)–(i) above with respect to iteratively updated operating parameter value ranges until a final preferred moving picture is selected;
and
(k) transmitting a final parameter control signal from the remote computer terminal to the imaging device such that the imaging device captures a final live video image using the updated operating parameter control value associated with the final preferred moving picture.

9 more elements

Dependencies are inferred from the claim text.

Parameterized preview array for iterative image optimization in remote applications

Life of this patent

Parameterized preview array for iterative image optimization in remote applications

Life of this patent

Abstract

Claims3