Probe card configuration for low mechanical flexural strength electrical routing substrates

A probe card assembly for testing a device comprising:

• a substrate with probe contacts on a first surface;
• a probe card to electrically connect said probe contacts to a test system;
• an electrical connection means to connect the probe contacts to the probe card;
• and
• support means positioned against a second surface of the substrate substantially opposite said probe contacts without electrically connecting to the probe contacts, the support means transmitted probe forces introduced when the probe contacts are urged against corresponding contacts or the device being tested;
• a frame provided around a peripheral edge of the substrate, the frame including a horizontal extension extending over the surface of the substrate, wherein the probe forces are transmitted by the support means to the frame;
• a first membrane provided between a surface of the horizontal extension of the frame and the first substrate surface;
• and
• a second membrane provided between the first membrane and the substrate to engage the substrate in an area separated from the peripheral edge of the substrate.

A probe card assembly for testing a device comprising:

• a first substrate with probe contacts on a first surface, the first substrate comprising a first material;
• a second substrate attached to a second surface of the first substrate, the second substrate including routing lines electrically connecting to the probe contacts, the routing lines further providing connections to a test system, the second substrate comprising a second material different than the first material;
• a printed circuit board (PCB) having connectors for connecting to a test head on one side, and electrical connections provided on a second side for connecting to the routing lines of a second substrate;
• an bracket fixedly connected to the PCB;
• a frame provided around a peripheral edge of the second substrate, the frame including a horizontal extension extending over the first surface of the second substrate, wherein the horizontal extension comprises a load support member extending vertically from a surface of the horizontal extension to engage the surface of the second substrate supporting the probe contacts in an area separated from the peripheral edge of the second substrate;
• and
• leaf springs having a first end attached to the bracket, and a second end to engage a surface of the frame.