Magnetic field sensing device and method for fabricating thereof
AssigneeSamsung Electronics Co., Ltd.
InventorsHae-seok Park, Kyung-won Na, Dong-sik Shim, Sang-on Choi
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Abstract
Disclosed is a magnetic field sensor of high sensitivity, and which is power-saving and can be manufactured with low cost in a very small size. The magnetic field sensor includes a soft magnetic core formed to construct a closed-magnetic circuit on a semiconductor substrate, a magnetic field sensing coil formed by a metal film in a shape that winds the soft magnetic core, and a drive line for exciting the soft magnetic core by directly applying an electric current thereto. The drive line is formed in a rectangular angle to the magnetic field sensing coil, and connected to the both ends of the soft magnetic core in a length direction.
Claims5
A magnetic field sensor comprising:
- a soft magnetic core formed in a semiconductor substrate to construct a closed-magnetic circuit;
- a magnetic field sensing coil formed by a metal film in a structure of winding magnetic core;
- and
- a drive line for exciting the soft magnetic core by directly applying an electric current thereto.
Dependencies are inferred from the claim text.